-The effect of Si content on structure and mechanical features of silicon-containing calcium-phosphate-based films deposited by RF-magnetron sputtering on titanium substrate treated by pulsed electron beam M Surmeneva, A Tyurin, T Mukhametkaliyev et al. Abstract. As the Si content was increased from 1.5 to 5 mass%, both the yield stress and ultimate tensile strength were increased, respectively. The work hardening rate was also increased as the increase of Si content. On the contrary, the elongation was decreased as the increase of Si content, and the fracture manner was shifted from ductile to brittle. The 10 7 cycles fatigue strength was higher as the increase of Si content. The small misorientation distribution as ladder-like was detected in the grains of 1.5 mass%Si steel. Around the grain boundary, the strain incompatibility was detected in the steels containing over 3 mass%Si. The lattice rotation was locally detected in the vicinity of grain boundaries.