Slip-stick step-scanner for scanning probe microscopy

Meyer, Christine; Sqalli, O.; Lorenz, H.; Karraï, K.

doi:10.1063/1.1927105

Cited by 49 publications

(20 citation statements)

References 7 publications

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“…Because the piezoelectric element is embedded into the moving element, this motor could be considered as a moving actuator type. Many of the inertia-drive type motors developed afterwards operate according to the above-mentioned initial structures [31][32][33][34][35][36][37][38][39][40][41][42][43][44][45]. We can also find literature that proposes ideal driving signals with detailed analysis of motion at the interface [46,47].…”

Section: Inertia-drivementioning

confidence: 99%

Piezoelectric Motor Using In-Plane Orthogonal Resonance Modes of an Octagonal Plate

Spanner

Koç

2018

Actuators

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Piezoelectric motors use the inverse piezoelectric effect, where microscopically small periodical displacements are transferred to continuous or stepping rotary or linear movements through frictional coupling between a displacement generator (stator) and a moving (slider) element. Although many piezoelectric motor designs have various drive and operating principles, microscopic displacements at the interface of a stator and a slider can have two components: tangential and normal. The displacement in the tangential direction has a corresponding force working against the friction force. The function of the displacement in the normal direction is to increase or decrease friction force between a stator and a slider. Simply, the generated force alters the friction force due to a displacement in the normal direction, and the force creates movement due to a displacement in the tangential direction. In this paper, we first describe how the two types of microscopic tangential and normal displacements at the interface are combined in the structures of different piezoelectric motors. We then present a new resonance-drive type piezoelectric motor, where an octagonal plate, with two eyelets in the middle of the two main surfaces, is used as the stator. Metallization electrodes divide top and bottom surfaces into two equal regions orthogonally, and the two driving signals are applied between the surfaces of the top and the bottom electrodes. By controlling the magnitude, frequency and phase shift of the driving signals, microscopic tangential and normal displacements in almost any form can be generated. Independently controlled microscopic tangential and normal displacements at the interface of the stator and the slider make the motor have lower speed-control input (driving voltage) nonlinearity. A test linear motor was built by using an octagonal piezoelectric plate. It has a length of 25.0 mm (the distance between any of two parallel side surfaces) and a thickness of 3.0 mm, which can produce an output force of 20 N.

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Section: Inertia-drivementioning

confidence: 99%

Piezoelectric Motor Using In-Plane Orthogonal Resonance Modes of an Octagonal Plate

Spanner

Koç

2018

Actuators

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“…The piezo-actuators selected for the scanning microscope allow sub-μm positional accuracy, while providing a large actuation range in each axis. That can be achieved by the slip-stick actuator principle [7]. The positioner/scanner as shown in Fig.…”

Section: Z-axismentioning

confidence: 99%

Raman technology for future planetary missions

Thiele

Höfer

Stuffler

et al. 2017

International Conference on Space Optics — ICSO 2006

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“…Piezoelectric inertia drive motors have been used for both optical and scanning probe microscopes successfully in vacuum environments [65,66].…”

Section: Inertia-drive-type Piezoelectric Motorsmentioning

confidence: 99%

Piezoelectric Motors, an Overview

2016

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Piezoelectric motors are used in many industrial and commercial applications. Various piezoelectric motors are available in the market. All of the piezoelectric motors use the inverse piezoelectric effect, where microscopically small oscillatory motions are converted into continuous or stepping rotary or linear motions. Methods of obtaining long moving distance have various drive and functional principles that make these motors categorized into three groups: resonance-drive (piezoelectric ultrasonic motors), inertia-drive, and piezo-walk-drive. In this review, a comprehensive summary of piezoelectric motors, with their classification from initial idea to recent progress, is presented. This review also includes some of the industrial and commercial applications of piezoelectric motors that are presently available in the market as actuators.

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Slip-stick step-scanner for scanning probe microscopy

Cited by 49 publications

References 7 publications

Piezoelectric Motor Using In-Plane Orthogonal Resonance Modes of an Octagonal Plate

Piezoelectric Motor Using In-Plane Orthogonal Resonance Modes of an Octagonal Plate

Raman technology for future planetary missions

Piezoelectric Motors, an Overview

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