Slotted photonic crystal nanobeam cavity with an ultrahigh quality factor-to-mode volume ratio

Seidler, Paul; Lister, Kevin; Drechsler, Ute; Hofrichter, Jens; Stöferle, Thilo

doi:10.1364/oe.21.032468

Cited by 81 publications

(65 citation statements)

References 44 publications

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“…The next mode is antisymmetric with a node of zero electric field in the middle of the device [30]. As the optical cavity modes are confined primarily to the slot region, a mechanical mode overlapping well with the electric field is the in-plane breathing mode involving lateral opening and closing of the slot.…”

Section: Working Principlementioning

confidence: 99%

“…In contrast to our previous work [30], the slot is terminated before the first hole on either side of the cavity in order to increase the mechanical resonance frequency of the breathing mode to several gigahertz. The distance between the first two holes corresponds to roughly half the effective wavelength of the central portion of the structure, so the first nodes in the electric field fall at the crosspieces closing off the first holes.…”

Section: Working Principlementioning

confidence: 99%

“…A higher number of holes decreases the rate of loss of intracavity photons to the attached waveguides, but it also lowers the rate of coupling into the cavity. The chip layout also includes input and output ridge waveguides with a length of several hundred microns connected to each device, at the ends of which focusing grating couplers are located to enable individual testing of the devices as previously described [30]. Here, however, we integrate the photonic crystal cavities into one arm of a Mach-Zehnder interferometer formed by two directional couplers connected with two waveguides (Fig.…”

Section: Fabricationmentioning

confidence: 99%

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Strong optomechanical coupling in a slotted photonic crystal nanobeam cavity with an ultrahigh quality factor-to-mode volume ratio

Schneider¹,

Seidler²

2016

Opt. Express

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We describe the design, fabrication, and characterization of a one-dimensional silicon photonic crystal cavity in which a central slot is used to enhance the overlap between highly localized optical and mechanical modes. The optical mode has an extremely small mode volume of 0.017(λ_vac / n)³, and an optomechanical vacuum coupling rate of 310 kHz is measured for a mechanical mode at 2.69 GHz. With optical quality factors up to 1.2 × 10⁵, fabricated devices are in the resolved-sideband regime. The electric field has its maximum at the slot wall and couples to the in-plane breathing motion of the slot. The optomechanical coupling is thus dominated by the moving-boundary effect, which we simulate to be six times greater than the photoelastic effect, in contrast to most structures, where the photoelastic effect is often the primary coupling mechanism.

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Section: Working Principlementioning

confidence: 99%

Section: Working Principlementioning

confidence: 99%

Section: Fabricationmentioning

confidence: 99%

See 1 more Smart Citation

Strong optomechanical coupling in a slotted photonic crystal nanobeam cavity with an ultrahigh quality factor-to-mode volume ratio

Schneider¹,

Seidler²

2016

Opt. Express

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“…Recently, Seidler et al demonstrated a silicon-air PhC cavity with an air gap to reduce the cavity mode volume by a factor of 12.1 to V eff ∼ 0.01λ 3 [15]. The type-1 BC is wavelength independent, which provides some tolerance to fabrication imperfections.…”

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confidence: 99%

Self-Similar Nanocavity Design with Ultrasmall Mode Volume for Single-Photon Nonlinearities

2017

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We propose a photonic crystal nanocavity design with self-similar electromagnetic boundary conditions, achieving ultrasmall mode volume (V eff ). The electric energy density of a cavity mode can be maximized in the air or dielectric region, depending on the choice of boundary conditions. We illustrate the design concept with a silicon-air one-dimensional photon crystal cavity that reaches an ultrasmall mode volume of V eff ∼ 7.01 × 10 −5 λ 3 at λ ∼ 1550 nm. We show that the extreme light concentration in our design can enable ultrastrong Kerr nonlinearities, even at the single-photon level. These features open new directions in cavity quantum electrodynamics, spectroscopy, and quantum nonlinear optics. DOI: 10.1103/PhysRevLett.118.223605 Optical nanocavities with small mode volume (V eff ) and high quality factor (Q) can greatly increase light-matter interaction [1] and have a wide range of applications including nanocavity lasers [2-4], cavity quantum electrodynamics [5,6], single-molecule spectroscopy [7], and nonlinear optics [8][9][10]. Planar photonic crystal cavities can enable high Q factors, exceeding 10 6 [11], together with mode volumes that are typically on the order of a qubic wavelength. However, it was shown that by introducing an air slot into a photonic crystal (PhC) cavity, it is possible to achieve the electromagnetic (EM) mode with small V eff on the order of 0.01λ 3 [12], where λ is the freespace wavelength. This field concentration results from the boundary condition on the normal component of the electric displacement ( ⃗ D). Here, we propose a method to further reduce V eff by making use of the second EM boundary condition, the conservation of the parallel component of the electric field. Furthermore, these field concentration methods can be concatenated to reduce V eff even further, limited only by practical considerations such as fabrication resolution. The extreme field concentration of our cavity design opens new possibilities in nonlinear optics. In particular, we show that Kerr nonlinearities, which are normally weak, would be substantially enhanced so that even a single photon may shift the cavity resonance by a full linewidth, under realistic assumptions of materials and fabrication tolerances.The mode volume of a dielectric cavity [described by the spatially varying permittivity ϵð ⃗rÞ] is given by the ratio of the total electric energy to the maximum electric energy density [13],In typical PhC cavity designs, the minimum cavity mode volume is given by a half-wavelength bounding box, or3 [14], agreeing with the diffraction limit. However, as is clear from Eq. (1), the mode volume is determined by the electric energy density at the position where it is maximized. Thus, it is not strictly restricted by the diffraction limit. A strong local inhomogeneity in ϵð ⃗rÞ can greatly increase this electric energy density and correspondingly shrink the mode volume. Figure 1(a) plots the fundamental mode of a silicon-air one-dimensional PhC cavity produced by three-dimensional FDTD simulati...

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“…The layout included input and output ridge waveguides with a length of several hundred microns connected to each device. Focusing grating couplers at the ends of the waveguides were used for transmission measurements 15,21 . The photonic crystal cavities, waveguides and grating couplers were patterned together in the top silicon by e-beam lithography and dry etching.…”

Section: Resultsmentioning

confidence: 99%

Optimized process for fabrication of free-standing silicon nanophotonic devices

Seidler

2017

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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A detailed procedure is presented for fabrication of free-standing silicon photonic devices that accurately reproduces design dimensions while minimizing surface roughness. By reducing charging effects during inductively coupled-plasma reactive ion etching, undercutting in small, high-aspect ratio openings is reduced. Slot structures with a width as small as 40 nm and an aspect ratio of 5.5:1 can be produced with a nearly straight, vertical sidewall profile. Subsequent removal of an underlying sacrificial silicon dioxide layer by wet-etching to create free-standing devices is performed under conditions which suppress attack of the silicon. Slotted one-dimensional photonic crystal cavities are used as sensitive test structures to demonstrate that performance specifications can be reached without iteratively adapting design dimensions; optical resonance frequencies are within 1% of the simulated values and quality factors on the order of 105 are routinely attained.

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Slotted photonic crystal nanobeam cavity with an ultrahigh quality factor-to-mode volume ratio

Cited by 81 publications

References 44 publications

Strong optomechanical coupling in a slotted photonic crystal nanobeam cavity with an ultrahigh quality factor-to-mode volume ratio

Strong optomechanical coupling in a slotted photonic crystal nanobeam cavity with an ultrahigh quality factor-to-mode volume ratio

Self-Similar Nanocavity Design with Ultrasmall Mode Volume for Single-Photon Nonlinearities

Optimized process for fabrication of free-standing silicon nanophotonic devices

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