Slowing-down time of energetic atoms in solids

Lattice sites of implanted Fe in Si

“…It is estimated from SRIM ͑Ref. 32͒ or MARLOWE simulations 33 that around 800-1300 vacancies and interstitials are created for every implanted Fe atom. The simulations indicate that the initial vacancy distribution is approximately a Gaussian of 330 ͑295͒ Å, i.e., centered at somewhat more than half of the projected range of the implants.…”

Evidence of N substitution by Mn in GaN

“…The implantations were performed under a tilt angle of 17 • to minimize ion channeling, using an energy of 50 keV, resulting in a peak concentration of 7×10 18 cm −3 at a projected range of 247Å with a 114Å straggling, as estimated using the MARLOWE code. 24 Angular-dependent emission yields of the β − particles emitted during decay to stable 56 Fe were measured at room temperature, along four crystallographic directions, [0001], [1102], [1101] and [2113], in the asimplanted state and after in situ capless annealing in vacuum (< 10 −5 mbar) at 300 • C, 600 • C, 700 • C, 800 • C and 900 • C. The patterns were recorded using a positionand energy-sensitive detection system similar to that described in Ref. 25.…”

Mixed Zn and O substitution of Co and Mn in ZnO

“…The 61 Mn ( 56 Mn) implantations were performed under a tilt angle of 17 • with respect to the surface normal in order to minimize ion channeling, with an energy of 60 keV (50 keV) and a fluence of 2×10 13 cm −2 , resulting in a peak concentration of 6×10 18 cm −3 (7×10 18 cm −3 ) at a projected range R p of 278Å (246Å) with a 125Å (115Å) straggling, estimated using the MARLOWE code. 25 The low concentration regime used in this study (below 1×10 19 cm −3 ) allows us to investigate the lattice location of Co and Mn free from phase segregation, which typically occurs for concentrations of the order of 10 21 cm −3 (i.e. three orders of magnitude higher) and above.…”