TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference 2007
DOI: 10.1109/sensor.2007.4300707
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Small Silicon Condenser Microphone Improved with a Backchamber with Concave Lateral Sides

Abstract: We have developed a very small, high-sensitivity silicon condenser microphone, in which a backchamber with concave lateral sides and a specific diaphragm were used as improvements. The concave sides increase the volume of the backchamber and thus solve the trade-off between chip downsizing and sensitivity. The novel backchamber was fabricated using a combination of isotropic and anisotropic etching. The diaphragm is supported only at the four corners to yield good deformation. The chip is 1.2 mm×1.3 mm×0.4 mm.… Show more

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Cited by 8 publications
(1 citation statement)
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“…A better acoustic performance can be achieved by making the chamber bigger. In this case, using the combination of isotropic and anisotropic etching, Kasai et al from OMRON Corporation [68] have proposed a microphone with concave lateral sides, which increase the volume of the back chamber.…”
mentioning
confidence: 99%
“…A better acoustic performance can be achieved by making the chamber bigger. In this case, using the combination of isotropic and anisotropic etching, Kasai et al from OMRON Corporation [68] have proposed a microphone with concave lateral sides, which increase the volume of the back chamber.…”
mentioning
confidence: 99%