Smart gas dosage by a peristaltic pump for reactive RF sputtering of composition spread combinatorial hafnium-oxy-nitride layers

Sáfrán, György; Szász, Noémi; Dobrik, Gergely; Kalas, Benjámin; Serényi, Miklós

doi:10.1016/j.vacuum.2020.109675

Cited by 4 publications

(5 citation statements)

References 11 publications

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“…The resulting O and N ratios in the film along the 10 × 25 mm 2 sized sample were determined by SEM EDS, while the optical properties, including the refractive index (n), were determined by easily applicable spectroscopic ellipsometry. The data obtained are summarized in Figure 15, whose results show a monotonic increase in the refractive index from 2.05 to 2.6 that was observed as O was depleted in the film [63].…”

Section: Hf-oxynitridesmentioning

confidence: 98%

“…The affinity of metals requires the oxygen proportion in the Ar-O-N plasma to be set orders of magnitude lower than that of nitrogen. In one approach, the required low partial pressure range of oxygen was covered by a self-regulating gas inlet assembly based on a peristaltic pump and a finite volume vial [63]. Accordingly, during reactive sputter deposition, while keeping the nitrogen input constant, the oxygen input, and thus the partial pressure of oxygen, gradually decreased toward the chamber base pressure, resulting in a steady decrease in the oxygen content of the deposited layer and thus a gradual transition of the film from oxide to nitride.…”

Section: Characterization Of Ternary Metal-oxynitride (Meon) Layer Sy...mentioning

confidence: 99%

“…This emphasizes the need for the comprehensive study of the physicochemical and structural properties of the HfON thin film system as a function of the related fabrication parameters and elemental composition, e.g., the oxygen and nitrogen content. In a onesample concept micro-combinatorial study, Safran et al investigated the correlations between the sputtering conditions, composition, and optical properties of the Hf-O-N thin film system over the entire O-N composition range [63].…”

Section: Hf-oxynitridesmentioning

confidence: 99%

“…To this end, the vacuum chamber for RF sputtering was equipped with the previously mentioned O 2 gas inlet system [63], whose schematic is shown in Figure 14a. The measured and calculated O 2 partial pressure values as a function of sputtering time and covering the range between 9 × 10 −5 and 1 × 10 −5 mbar are shown in Figure 14b.…”

Section: Hf-oxynitridesmentioning

confidence: 99%

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Review on High-Throughput Micro-Combinatorial Characterization of Binary and Ternary Layers towards Databases

et al. 2023

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The novel, single-sample concept combinatorial method, the so-called micro-combinatory technique, has been shown to be suitable for the high-throughput and complex characterization of multicomponent thin films over an entire composition range. This review focuses on recent results regarding the characteristics of different binary and ternary films prepared by direct current (DC) and radiofrequency (RF) sputtering using the micro-combinatorial technique. In addition to the 3 mm diameter TEM grid used for microstructural analysis, by scaling up the substrate size to 10 × 25 mm, this novel approach has allowed for a comprehensive study of the properties of the materials as a function of their composition, which has been determined via transmission electron microscopy (TEM), scanning electron microscopy (SEM), Rutherford backscattering spectrometry (RBS), X-ray diffraction analysis (XRD), atomic force microscopy (AFM), spectroscopic ellipsometry, and nanoindentation studies. Thanks to the micro-combinatory technique, the characterization of multicomponent layers can be studied in greater detail and efficiency than before, which is beneficial for both research and practical applications. In addition to new scientific advances, we will briefly explore the potential for innovation with respect to this new high-throughput concept, including the creation of two- and three-component thin film databases.

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Section: Hf-oxynitridesmentioning

confidence: 98%

Section: Characterization Of Ternary Metal-oxynitride (Meon) Layer Sy...mentioning

confidence: 99%

Section: Hf-oxynitridesmentioning

confidence: 99%

Section: Hf-oxynitridesmentioning

confidence: 99%

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Review on High-Throughput Micro-Combinatorial Characterization of Binary and Ternary Layers towards Databases

et al. 2023

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“…Our method has so far been used to study the morphology, structure and material properties of a number of multicomponent films with variable compositions, e.g., Si-Ge, Hf-O-N, Al-Cu, Si-O-N, etc. [ 7 , 8 , 9 , 10 ].…”

Section: Introductionmentioning

confidence: 99%

High-Throughput Micro-Combinatorial TEM Phase Mapping of the DC Magnetron Sputtered YxTi1−xOy Thin Layer System

Olasz,

Kis,

Cora

et al. 2024

Nanomaterials

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High-throughput methods are extremely important in today’s materials science, especially in the case of thin film characterization. The micro-combinatorial method enables the deposition and characterization of entire multicomponent thin film systems within a single sample. In this paper, we report the application of this method for the comprehensive TEM characterization of the Y-Ti-O layer system. Variable composition samples (YxTi1−xOy) were prepared by dual DC magnetron sputtering, covering the entire (0 ≤ x ≤ 1) concentration range. The structure and morphology of phases formed in both as-deposited and annealed samples at 600, 700, and 800 °C were revealed as a function of Y-Ti composition (x). A comprehensive map showing the appropriate amorphous and crystalline phases, and their occurrence regions of the whole Y-Ti-O layer system, was revealed. Thanks to the applied method, it was shown with ease that at the given experimental conditions, the Y2Ti2O7 phase with a pyrochlore structure forms already at 700 °C without the TiO2 and Y2O3 by-phases, which is remarkably lower than the required temperature for most physical preparation methods, demonstrating the importance and benefits of creating phase maps in materials science and technology.

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The influences of Ag content on the friction and wear properties of TiCN–Ag films

Zhou

Liu

et al. 2022

Vacuum

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Smart gas dosage by a peristaltic pump for reactive RF sputtering of composition spread combinatorial hafnium-oxy-nitride layers

Cited by 4 publications

References 11 publications

Review on High-Throughput Micro-Combinatorial Characterization of Binary and Ternary Layers towards Databases

Review on High-Throughput Micro-Combinatorial Characterization of Binary and Ternary Layers towards Databases

High-Throughput Micro-Combinatorial TEM Phase Mapping of the DC Magnetron Sputtered YxTi1−xOy Thin Layer System

The influences of Ag content on the friction and wear properties of TiCN–Ag films

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