2008 Solid-State, Actuators, and Microsystems Workshop Technical Digest 2008
DOI: 10.31438/trf.hh2008.73
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Smart Microfabricated Chemical Preconcentrator

Abstract: The mass-sensitive smart preconcentrator (SPC) can determine when it has collected sufficient sample for analysis by a downstream chemical sensor system. The SPC consists of a Lorentz-Force-actuated MEMS resonator with an integral heater and surface coating for the collection of chemical analytes. The resonant frequency of the device varies with the mass of collected analyte. The limit of detection (LOD) of the SPC is less than 50 ppb for DMMP (dimethyl-methyl-phosphonate). At 1 ppm, 1 second collection of DMM… Show more

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Cited by 4 publications
(5 citation statements)
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“…Thus, a detector integrated with a preconcentrator can be used to detect a much lower concentration of analyte gases than the detector's lower limit of detection. [ 22 ]…”
Section: Preconcentrator Characteristicsmentioning
confidence: 99%
See 1 more Smart Citation
“…Thus, a detector integrated with a preconcentrator can be used to detect a much lower concentration of analyte gases than the detector's lower limit of detection. [ 22 ]…”
Section: Preconcentrator Characteristicsmentioning
confidence: 99%
“…Thus, a detector integrated with a preconcentrator can be used to detect a much lower concentration of analyte gases than the detector's lower limit of detection. [22] Preconcentration factor, also known as the enrichment factor or concentration factor is an important parameter for determining the efficiency of a preconcentrator. Preconcentration factor can be defined as the ratio of the concentration of the analyte delivered to the detector on the outlet upon desorption from the preconcentrator, to the concentration of the analyte in the inlet gas.…”
Section: Introductionmentioning
confidence: 99%
“…4(a). The heater is built of a platinum layer (Pt), which is covered by a microporous adsorbent layer [24].…”
Section: Concentrators Design Analysesmentioning
confidence: 99%
“…Numerous developments have been reported on the miniaturization of PCs in micro-GC system. Manginell et al from Sandia National Laboratories reported on a microfabricated planar PC, incorporating a surfactant templated sol gel adsorbent layer to achieve efficient analyte collection with rapid, efficient thermal desorption [34]. Alfeeli et al presented a microthermal PC device with 3D structures with a high aspect ratio and coated with a uniform polymer adsorbent film, which has sharp reproducible desorption peaks [12].…”
Section: Introductionmentioning
confidence: 99%