2011
DOI: 10.1177/0040517511411966
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Smart textiles: an explorative study of the use of magnetron sputter deposition

Abstract: Reactive magnetron sputtering is a widely used deposition technique in different application areas. In this study its use is evaluated for the deposition of metal thin films (Al, Cu and Ti) and oxide thin films (Al2O3, TiOx) on woven and nonwoven substrates. The study shows that good adhesion can only be achieved when the substrate is pre-treated in a glow discharge. The influence of the substrate on the reflectivity of Al and Cu thin films was investigated. For conductive textile applications, the resistivity… Show more

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Cited by 34 publications
(26 citation statements)
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“…7,8 Moreover, conductive fabrics can be enabled using coating techniques such as printing, sputtering, electroless plating, and vapor coating. 6,[9][10][11] Resistivity is an intrinsic physical property of the CTM. Electroconductive properties of woven and knitted fabrics are modeled using the equivalent resistance schemes in particular.…”
Section: Introductionmentioning
confidence: 99%
“…7,8 Moreover, conductive fabrics can be enabled using coating techniques such as printing, sputtering, electroless plating, and vapor coating. 6,[9][10][11] Resistivity is an intrinsic physical property of the CTM. Electroconductive properties of woven and knitted fabrics are modeled using the equivalent resistance schemes in particular.…”
Section: Introductionmentioning
confidence: 99%
“…The magnetron sputtering technology can be used to prepare super-hard films, wearable and corrosion-resistant films, superconducting films, magnetic films, optical films, and other specific films [1]. It has been using the magnetron sputtering to deposit thin films on fabric to obtain functionalities, such as wettability, hydrophilicity, hydrophobicity, antibacterial property, and uvioresistant property [2][3][4][5][6][7][8][9].…”
Section: Introductionmentioning
confidence: 99%
“…Recently, growing interest in Plasma Assisted Physical Vapor Deposition (PA-PVD) for surface modification of textiles has been * E-mail: rafal.chodun@inmat.pw.edu.pl observed. The magnetron sputtering method (MS) as the most widely used PAPVD method seemed to be a good choice [6][7][8]. Unfortunately, the most common problems for coatings deposition on textiles by MS are poor adhesion, cracking and limited thickness [9,10].…”
Section: Introductionmentioning
confidence: 99%