Smooth Continuous Films of Stoichiometric Silicon Carbide from Poly(methylsilyne)

Abstract

A new synthesis of the silicon‐network‐backbone polymer poly(methylsilyne) gives a material that is easily converted by pyrolysis to smooth continous films of stoichiometric silicon carbide (see Figure). The films are adherent to the silicon or alumina substrates, and show root mean square roughness of 169 Å over a 500 μm range. Applications in electronics are envisaged.

Electrochemical synthesis of poly(methylsilyne) and investigation of the effects of parameters on the synthesis

“…Poly(methylsilyne) was synthesized both as an oil and a solid in literature, because of the differences in the molecular weights of the products. 2,11,12 The FTIR and 1 H-NMR spectra of the samples are shown in Figures 2 and 3 An intense peak around 1080 cm À1 is observed in the FTIR result. This intense SiAOASi band is also present in the FTIR result of poly(methylsilyne) in the studies in literature and generally explained by the reactivity of the monomer towards oxygen.…”

“…This intense SiAOASi band is also present in the FTIR result of poly(methylsilyne) in the studies in literature and generally explained by the reactivity of the monomer towards oxygen. 2,11,12 The intensity of the peak is not an indication of the excess amount of this bond. Even small amounts of SiAOASi will give an intense absorption at this region.…”

“…9,10,[13][14][15][16][17] Poly(methylsilyne), [SiCH 3 ] n , is a relatively new member of poly(alkylsilyne) family, and it is a promising silicon carbide precursor with its optimum Si : C ratio of 1 : 1 and solubility in common nonpolar organic solvents. 2 In literature, poly(methylsilyne) is synthesized by a modified sono-chemistry 2 and also by electrochemical polymerization of methyltrichlorosilane, which does not require high-boiling solvents or alkali metal reducing agents. 11,12 In our previous study, poly(methylsilyne) was synthesized electrochemically using simply a series of batteries with an anionic surfactant as the supporting electrolyte in small-scale (25 mL undivided cell).…”

“…1,2 These preceramic polymers are also used in the synthesis of cellular porous ceramic foams 1 and as additives in common thermoplastics to improve their flame retardancy and thermal properties. [3][4][5][6][7] Silicon-based preceramic polymers gained great importance for the last 30 years since production of silicon carbide by polymer pyrolysis is the most efficient and successful method.…”

FABRICATION OF CERAMIC POWDERS SiC AND Si3N4 USING CO2-LASER

“…Метод пиролиза достаточно удобен, посколь-ку из полимера можно сформировать изделие любой формы перед запеканием в керами-ку [2][3][4][5].…”