SnO2/Pt Thin Film Laser Ablated Gas Sensor Array

Abstract

A gas sensor array was developed in a 10 × 10 mm2 space using Screen Printing and Pulse Laser Ablation Deposition (PLAD) techniques. Heater, electrode, and an insulator interlayer were printed using the screen printing method on an alumina substrate, while tin oxide and platinum films, as sensing and catalyst layers, were deposited on the electrode at room temperature using the PLAD method, respectively. To ablate SnO2 and Pt targets, depositions were achieved by using a 1,064 nm Nd-YAG laser, with a power of 0.7 J/s, at different deposition times of 2, 5 and 10 min, in an atmosphere containing 0.04 mbar (4 kPa) of O2. A range of spectroscopic diffraction and real space imaging techniques, SEM, EDX, XRD, and AFM were used in order to characterize the surface morphology, structure, and composition of the films. Measurement on the array shows sensitivity to some solvent and wood smoke can be achieved with short response and recovery times.

Review: Influences of Semiconductor Metal Oxide Properties on Gas Sensing Characteristics

“…To the main advantages of the semiconducting sensor arrays belong very high sensitivity, limited sensing range, rapid response, and recovery times (Wilson and Baietto, 2009). The creation of sensor array systems with a high sensing performance based on the commercially available MOx gas sensors (Penza et al, 2011;Fonollosa et al, 2015;Gebicki and Szulczyński, 2018) and on self-produced sensitive layers (Lee et al, 2002;Krivetsky et al, 2009;Abadi et al, 2011;Peng et al, 2019) have been already highlighted in the literature. For instance, the combination in one device MOx based on sensitive layers with different additives effects strongly on the sensing performance.…”

Nano-sized SnO₂ Photocatalysts: Synthesis, Characterization and Their Application for the Degradation of Methylene Blue Dye

“…Tin oxide (SnO 2 ) is one of the most intensely studied n-type semiconductor. During the past decade, SnO 2 has been widely used in solid-state gas sensors [11], transparent conducting electrodes [12], rechargeable Li batteries [13], optical electronic devices [14] and solar cells [15]. The structure, bandgap, and chemical stability of SnO 2 are similar to those of titanium dioxide, which is widely used photocatalyst.…”

MHDA-Functionalized Multiwall Carbon Nanotubes for detecting non-aromatic VOCs

“…The monitoring of the environment requires devices that must be fast, sensitive, stable and selective to detect the pollutants and toxic gases/vapors in a simple and efficient way 1 2 3 . Since 1962, when it was reported that the interaction between gas molecules and the surface of a metal oxide semiconductor altered the conductivity of the material, the advances in manufacturing techniques have enabled the production of low cost sensors with improved sensitivity 4 5 6 7 8 . Additionally, also gas sensors employing organic semiconductor materials have been reported for the detection of hazardous gases in air, and especially, organic pollutants 9 10 .…”