Soft-Clamped Silicon Nitride String Resonators at Millikelvin Temperatures

Gisler, Thomas; Mohamed, Helal,; Sabonis, Deividas; Grob, Urs; Héritier, M; Degen, Christian L.; Ghadimi, Amir H.; Eichler, Alexander

doi:10.1103/physrevlett.129.104301

Cited by 10 publications

(6 citation statements)

References 52 publications

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“…These include the exploration of weak forces such as ultralight dark matter 48 and the investigation of gravitational effects at the nanoscale 28 , 71 . While Si 3 N 4 resonators have demonstrated the highest room-temperature quality factors, it is noteworthy that the quality factor for Si 3 N 4 resonators has been consistently reported to increase at cryogenic temperatures 72 , 73 . Based on conservative estimates, we predict that our centimeter-scale resonators could exhibit Q factors above 6 × 10 10 at cryogenic temperatures, potentially surpassing current cryogenic devices 53 , 54 .…”

Section: Discussionmentioning

confidence: 99%

Centimeter-scale nanomechanical resonators with low dissipation

Cupertino,

Shin,

Guo

et al. 2024

Nat Commun

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High-aspect-ratio mechanical resonators are pivotal in precision sensing, from macroscopic gravitational wave detectors to nanoscale acoustics. However, fabrication challenges and high computational costs have limited the length-to-thickness ratio of these devices, leaving a largely unexplored regime in nano-engineering. We present nanomechanical resonators that extend centimeters in length yet retain nanometer thickness. We explore this expanded design space using an optimization approach which judiciously employs fast millimeter-scale simulations to steer the more computationally intensive centimeter-scale design optimization. By employing delicate nanofabrication techniques, our approach ensures high-yield realization, experimentally confirming room-temperature quality factors close to theoretical predictions. The synergy between nanofabrication, design optimization guided by machine learning, and precision engineering opens a solid-state path to room-temperature quality factors approaching 10 billion at kilohertz mechanical frequencies – comparable to the performance of leading cryogenic resonators and levitated nanospheres, even under significantly less stringent temperature and vacuum conditions.

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Section: Discussionmentioning

confidence: 99%

Centimeter-scale nanomechanical resonators with low dissipation

Cupertino,

Shin,

Guo

et al. 2024

Nat Commun

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“…The main innovation on this path was a technique commonly referred to as 'dissipation dilution': applying tensile strain to a mechanical resonator increases its resonance frequency f 0 without affecting the dissipation rate Γ = 2π f 0 /Q, hence increasing Q [28,29]. Later, the implementation of mode shape engineering led to further significant improvements in Γ and Q [30][31][32][33] (see [34] for a more comprehensive list of references). These developments were primarily fuelled by the need for quantum devices with long thermal coherence times and high Qf 0 products, but the resulting devices also open up exciting perspectives in force sensing.…”

Section: Statusmentioning

confidence: 99%

Roadmap on nanoscale magnetic resonance imaging

Budakian,

Finkler,

Eichler

et al. 2024

Nanotechnology

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The field of nanoscale magnetic resonance imaging (NanoMRI) was started 30 years ago. It was motivated by the desire to image single molecules and molecular assemblies, such as proteins and virus particles, with near-atomic spatial resolution and on a length scale of 100 nm. Over the years, the NanoMRI field has also expanded to include the goal of useful high-resolution nuclear magnetic resonance (NMR) spectroscopy of molecules under ambient conditions, including samples up to the micron-scale. The realization of these goals requires the development of spin detection techniques that are many orders of magnitude more sensitive than conventional NMR and MRI, capable of detecting and controlling nanoscale ensembles of spins. Over the years, a number of different technical approaches to NanoMRI have emerged, each possessing a distinct set of capabilities for basic and applied areas of science. The goal of this roadmap article is to report the current state of the art in NanoMRI technologies, outline the areas where they are poised to have impact, identify the challenges that lie ahead, and propose methods to meet these challenges. This roadmap also shows how developments in NanoMRI techniques can lead to breakthroughs in emerging quantum science and technology applications.

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“…These include patterning 2D geometries appropriately, [9,[11][12][13]70,71] modifying mass distribution [2,72] and mode of interest (e.g., from fundamental to higher order or from flexural to torsional modes [2] ), in situ annealing for surface cleaning, [73] as well as cooling down to cryogenic temperatures. [14,74] The methods mentioned above can benefit from utilizing the LPCVD a-SiC thin film we characterized in this work, due to its high deposition film tensile stress, superior chemical resistivity, and impressive ultimate tensile strength.…”

Section: Intrinsic Quality Factor and High Q Mechanical Resonatorsmentioning

confidence: 99%

High‐Strength Amorphous Silicon Carbide for Nanomechanics

Xu,

Shin,

Sberna

et al. 2023

Advanced Materials

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For decades, mechanical resonators with high sensitivity have been realized using thin‐film materials under high tensile loads. Although there have been remarkable strides in achieving low‐dissipation mechanical sensors by utilizing high tensile stress, the performance of even the best strategy is limited by the tensile fracture strength of the resonator materials. In this study, a wafer‐scale amorphous thin film is uncovered, which has the highest ultimate tensile strength ever measured for a nanostructured amorphous material. This silicon carbide (SiC) material exhibits an ultimate tensile strength of over 10 GPa, reaching the regime reserved for strong crystalline materials and approaching levels experimentally shown in graphene nanoribbons. Amorphous SiC strings with high aspect ratios are fabricated, with mechanical modes exceeding quality factors 108 at room temperature, the highest value achieved among SiC resonators. These performances are demonstrated faithfully after characterizing the mechanical properties of the thin film using the resonance behaviors of free‐standing resonators. This robust thin‐film material has significant potential for applications in nanomechanical sensors, solar cells, biological applications, space exploration and other areas requiring strength and stability in dynamic environments. The findings of this study open up new possibilities for the use of amorphous thin‐film materials in high‐performance applications.This article is protected by copyright. All rights reserved

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Soft-Clamped Silicon Nitride String Resonators at Millikelvin Temperatures

Cited by 10 publications

References 52 publications

Centimeter-scale nanomechanical resonators with low dissipation

Centimeter-scale nanomechanical resonators with low dissipation

Roadmap on nanoscale magnetic resonance imaging

High‐Strength Amorphous Silicon Carbide for Nanomechanics

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