Soft-error evaluation using proton microprobe for DRAMs

Sayama,; Hara,; Kimura,; Ohno,; Satoh,; Takai,

doi:10.1109/iedm.1992.307479

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Cited by 4 publications

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“…The parallel beam also allows control of the angle of the alpha particle strikes. In some experiments, the alpha particles in a beam have been limited, either through masking [2] or focusing [3][4][5], to small spots that can be directed at specific parts of the circuitry.…”

Section: Introductionmentioning

confidence: 99%

Accurate measurements of small charges collected on junctions from alpha particle strikes using an accelerator-produced microbeam

Aton

Seitchik

Jantz

et al. 1995

33rd IEEE International Reliability Physics Symposium

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We describe an accelerator-based system for accurate experiments of alpha particle strikes on integrated circuits. It produces a high-flux, micron-dimensioned collimated beam in air. High speed blanking controls the arrival time and number of alphas. We accurately measure the small alpha-generated charges that collect on junctions using novel test structures and measure SRAM soft error rates. The test structure results are compared to results from our fast alpha-strike simulator.

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Section: Introductionmentioning

confidence: 99%