2006
DOI: 10.1016/j.elstat.2005.03.090
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Soft ESD phenomena in GMR heads in the HDD manufacturing process

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Cited by 9 publications
(8 citation statements)
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“…Damage to heads can be generated from soft ESD (latent failures) and hard ESD which leads directly to device melting [3] - [5]. Examples of damage from hard ESD are illustrated using scanning electron microscopy (SEM) as shown in Fig.…”
Section: Hdd Manufacturing Processmentioning
confidence: 99%
“…Damage to heads can be generated from soft ESD (latent failures) and hard ESD which leads directly to device melting [3] - [5]. Examples of damage from hard ESD are illustrated using scanning electron microscopy (SEM) as shown in Fig.…”
Section: Hdd Manufacturing Processmentioning
confidence: 99%
“…The electric field expanded from this electrostatic eliminator has an insignificant effect on the voltage potential of the object. This ionizer is very promising for electrostatic elimination situations requiring an extremely low-offset voltage (ion balance), such as a magnetic head slider used in hard disc drives where the ion balance is restricted to a maximum of 2-10 V in the manufacturing process [15,16,17].…”
Section: Figure 15mentioning
confidence: 99%
“…The bad ion balance causes ESD problem on the latest electronic devices, which have high sensitivity to ESD damage. For example, the ion balance is limited less than 25-100 V in the manufacturing process of electric devices, and only several volts in the process of hard disc heads have a very high sensitivity for ESD [15][16][17][18].…”
Section: Introductionmentioning
confidence: 99%
“…The thermal conduction and the temperature of reader layers triggered by Joule heat are determined by (2) where is the heat flux is the density, is the heat capacity, is the temperature, is the thermal conductivity, and is the time.…”
Section: Simulationsmentioning
confidence: 99%
“…Melting of spacer layer (copper) has been most commonly found for hard ESD damage while degradation of magnetic properties in anti-ferromagenic layer (AFM) is commonly found, specially pinning reversal types of soft ESD failures [1], [2]. As in GMR, magnetic changes also occur before any resistance change [3]- [5].…”
Section: Introductionmentioning
confidence: 97%