Soft UV Nanoimprint Lithography: A Tool to Design Plasmonic Nanobiosensors

Barbillon, Grégory

doi:10.5772/20572

Cited by 5 publications

(5 citation statements)

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“…Controlling the stability of relief patterns in polymer thin films presents an important problem from both fundamental and applications standpoint. Surface patterns are utilized in various applications such as lithography, nanodevices, optical diffusers, and biosensors where a decay in the stability of these structures can render them unusable. The stability of imprinted nanostructures in homopolymer films has been extensively studied, using both ex situ − and in situ − techniques.…”

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confidence: 99%

Tuning the Relaxation of Nanopatterned Polymer Films with Polymer-Grafted Nanoparticles: Observation of Entropy–Enthalpy Compensation

et al. 2018

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Polymer films provide a versatile platform in which complex functional relief patterns can be thermally imprinted with a resolution down to few nanometers. However, a practical limitation of this method is the tendency for the imprinted patterns to relax (“slump”), leading to loss of pattern fidelity over time. While increasing temperature above glass transition temperature (Tg) accelerates the slumping kinetics of neat films, we find that the addition of polymer-grafted nanoparticles (PGNP) can greatly enhance the thermal stability of these patterns. Specifically, increasing the concentration of poly(methyl methacrylate) (PMMA) grafted titanium dioxide (TiO2) nanoparticles in the composite films slows down film relaxation dynamics, leading to enhanced pattern stability for the temperature range that we investigated. Interestingly, slumping relaxation time is found to obey an entropy–enthalpy compensation (EEC) relationship with varying PGNP concentration, similar to recently observed relaxation of strain-induced wrinkling in glassy polymer films having variable film thickness. The compensation temperature, Tcomp was found to be in the vicintity of the bulk Tg of PMMA. Our results suggest a common origin of EEC relaxation in patterned polymer thin films and nanocomposites.

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confidence: 99%

Tuning the Relaxation of Nanopatterned Polymer Films with Polymer-Grafted Nanoparticles: Observation of Entropy–Enthalpy Compensation

et al. 2018

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“…Nanoimprint lithography [88] is a high throughput method that has a high resolution, is low cost, and able to imprint a large area and can be done in a single step. Nanoimprint lithography uses a mold (fabricated using photolithography or e-beam lithography) to imprint the pattern onto a substrate coated with a UV-curable resist layer, the substrate is then processed by heat or UV light followed by a release step and etching process to remove the residual.…”

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confidence: 99%

Metasurfaces for biomedical applications: imaging and sensing from a nanophotonics perspective

et al. 2020

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Metasurface is a recently developed nanophotonics concept to manipulate the properties of light by replacing conventional bulky optical components with ultrathin (more than 104 times thinner) flat optical components. Since the first demonstration of metasurfaces in 2011, they have attracted tremendous interest in the consumer optics and electronics industries. Recently, metasurface-empowered novel bioimaging and biosensing tools have emerged and been reported. Given the recent advances in metasurfaces in biomedical engineering, this review article covers the state of the art for this technology and provides a comprehensive interdisciplinary perspective on this field. The topics that we have covered include metasurfaces for chiral imaging, endoscopic optical coherence tomography, fluorescent imaging, super-resolution imaging, magnetic resonance imaging, quantitative phase imaging, sensing of antibodies, proteins, DNAs, cells, and cancer biomarkers. Future directions are discussed in twofold: application-specific biomedical metasurfaces and bioinspired metasurface devices. Perspectives on challenges and opportunities of metasurfaces, biophotonics, and translational biomedical devices are also provided. The objective of this review article is to inform and stimulate interdisciplinary research: firstly, by introducing the metasurface concept to the biomedical community; and secondly by assisting the metasurface community to understand the needs and realize the opportunities in the medical fields. In addition, this article provides two knowledge boxes describing the design process of a metasurface lens and the performance matrix of a biosensor, which serve as a “crash-course” introduction to those new to both fields.

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“…. These structures present nearly perfect omnidirectional absorption in the infra-red regime independently of the incident angle and light polarization and outstanding biochemical sensing performances with high refractive index sensitivity and figure of merit 10 times higher than conventional LSPR based biosensor [12,13,18,[68][69][70][71]. Figure 10 presented some nanophotonic devices made using soft UV-NIL.…”

Section: Nanophotonic Devicesmentioning

confidence: 99%

Soft UV Nanoimprint Lithography and Its Applications

Lan¹

2013

Updates in Advanced Lithography

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Additional information is available at the end of the chapter http://dx.doi.org/10.5772/56186 . IntroductionLarμe-area nanopatterninμ tecνnoloμy νas demonstrated νiμν potential wνicν can siμniλi-cantly enνance tνe perλormance oλ many devices and products, sucν as LEDs, solar cells, νard disk drives, laser diodes, display, etc [ ]. For example, nano-patterned sappνire substrates NPSS and pνotonic crystals PνC νave been considered as tνe most eλλective approacνes to improve tνe liμνt output eλλiciency internal quantum eλλiciency and external quantum eλλiciency oλ LEDs and beam sνapinμ [ , ]. Tνe solar cells witν sub-micro anti-reλlective coatinμ exνibited νiμνer pνotocurrent and νiμνer power conversion eλλiciency compared to tνose witνout nanostructures [ ]. Moreover, tνe ability to produce larμe-area micro-and nanostructures on non-planar surλaces is oλ importance λor many applications sucν as optics, optoelectronics, nanopνotonics, imaμinμ tecνnoloμy, NEMS, and microλluidics [ ]. However, creatinμ larμe-area nanostructures on curved or non-planar surλaces are extremely diλλicult usinμ existinμ patterninμ approacνes. Furtνermore, a variety oλ existinμ nanopatterninμ tecνnoloμies sucν as electron beam litνoμrapνy EL" , optical litνoμrapνy, interλerence litνoμrapνy IL , etc., cannot cope witν all tνe practical demands oλ industrial applications witν respect to νiμν resolution, νiμν tνrouμνput, low cost, larμe area, and patterninμ on nonλlat and curved surλace. Tνereλore, new νiμν volume nanomanuλacturinμ tecνnoloμy stronμly needs to be exploited and developed so as to meet tνe tremendous requires oλ rapid μrowinμ markets.Nanoimprint litνoμrapνy NIL νas now been considered as a promisinμ nanopatterninμ metνod witν low cost, νiμν tνrouμνput and νiμν resolution, especially λor producinμ tνe larμe-area micro/nano scale patterns and complex -D structures and as well as νiμν-aspect-ratio λeatures. Due to tνese outstandinμ advantaμes, it was accepted by International Tecνnoloμy Roadmap λor Semiconductors ITRS in λor tνe and nm nodes, scνeduled λor industrial manuλacturinμ in . Tosνiba νas validated NIL λor nm and beyond. NIL νas also been listed as one oλ emerμinμ tecνnoloμies tνat will stronμly impact tνe world by Compared to otνer NIL processes tνermal NIL or νot embossinμ, UV-NIL witν riμid mold and nanopatterninμ metνods, soλt UV-NIL usinμ a λlexible or soλt mold νas been proven to be a very promisinμ approacν λor makinμ larμe-area patterns up to waλer-level in tνe micrometer and nanometer scale, λabricatinμ -D micro/nano structures and νiμν-aspect-ratio λeatures, especially producinμ larμe-area patterns on tνe non-planar surλaces even curved substrates at low-cost and witν νiμν tνrouμνput. Since tνe soλt mold stamp, template is adopted, tνe soλt UV-NIL process νas some unique advantaμes compared witν tνe traditional UV-NIL witν riμid mold. Tνese strenμtνs include Cost reduction. Cνeap soλt molds can be easily replicated λrom one expensive master, siμniλicantly reducinμ cost oλ tνe master template λabrication.Conλorma...

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Soft UV Nanoimprint Lithography: A Tool to Design Plasmonic Nanobiosensors

Cited by 5 publications

References 25 publications

Tuning the Relaxation of Nanopatterned Polymer Films with Polymer-Grafted Nanoparticles: Observation of Entropy–Enthalpy Compensation

Tuning the Relaxation of Nanopatterned Polymer Films with Polymer-Grafted Nanoparticles: Observation of Entropy–Enthalpy Compensation

Metasurfaces for biomedical applications: imaging and sensing from a nanophotonics perspective

Soft UV Nanoimprint Lithography and Its Applications

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