2015
DOI: 10.1016/j.elspec.2015.05.013
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Soft X-ray spectromicroscopy and ptychography

Abstract: a b s t r a c tInstrumentation and current capabilities of soft X-ray (50-2000 eV) spectromicroscopy are outlined with examples from recently published and some new work. Four common techniques are treated-transmission X-ray microscopy (TXM), scanning transmission X-ray microscopy (STXM), X-ray photoemission electron microscopy (XPEEM) and scanning photoemission microscopy (SPEM). I also present a fifth, emerging technique, that of soft X-ray spectro-ptychography which has significantly improved spatial resolu… Show more

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Cited by 105 publications
(87 citation statements)
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“…Analyzable elements with a K‐edge or L‐edge within the soft X‐ray roughly span from Be to Zr. Spectromicroscopy provides imaging capabilities with high spectral resolution and may be combined with microspectroscopic techniques, such as X‐ray absorption spectroscopy (XAS)—both through transmission and energy‐resolved X‐ray fluorescence (XRF) detection—and X‐ray photoelectron spectroscopy (XPS) (Hitchcock et al, 2010; Pushie et al, 2014; Hitchcock, 2015). The main types of synchrotron radiation‐based soft X‐ray spectromicroscopy include scanning transmission X‐ray microscopy (STXM), transmission X‐ray microscopy (TXM), X‐ray photoemission electron microscopy (X‐PEEM), and scanning photoelectron microscopy (SPEM) (Fig.…”
Section: Soft X‐ray Spectromicroscopymentioning
confidence: 99%
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“…Analyzable elements with a K‐edge or L‐edge within the soft X‐ray roughly span from Be to Zr. Spectromicroscopy provides imaging capabilities with high spectral resolution and may be combined with microspectroscopic techniques, such as X‐ray absorption spectroscopy (XAS)—both through transmission and energy‐resolved X‐ray fluorescence (XRF) detection—and X‐ray photoelectron spectroscopy (XPS) (Hitchcock et al, 2010; Pushie et al, 2014; Hitchcock, 2015). The main types of synchrotron radiation‐based soft X‐ray spectromicroscopy include scanning transmission X‐ray microscopy (STXM), transmission X‐ray microscopy (TXM), X‐ray photoemission electron microscopy (X‐PEEM), and scanning photoelectron microscopy (SPEM) (Fig.…”
Section: Soft X‐ray Spectromicroscopymentioning
confidence: 99%
“…1). All four spectromicroscopic techniques may be combined with near‐edge X‐ray absorption fine structure (NEXAFS), and X‐PEEM and SPEM may be coupled with XPS with the addition of an electron dispersive analyzer (Hitchcock, 2015). Low‐energy XRF is available on select STXM and TXM beamlines, which offers improved detection over transmission mode (Gianoncelli et al, 2009; Kaulich et al, 2009; Hitchcock et al, 2010 2012).…”
Section: Soft X‐ray Spectromicroscopymentioning
confidence: 99%
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“…
Scanning transmission X-ray microscopy (STXM) employs a nano-sized X-ray beam and provides spectro-microscopic information by measuring the absolute absorption of the specimen in transmission; thus both chemical images and detailed absorption spectroscopic features of a single nanostructure (including its thickness) can be revealed [1]. STXM-Ptychography reaches a spatial resolution of 10 nm in the hard X-ray and below 5 nm in the soft X-ray [2,3].
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mentioning
confidence: 99%