Manufacturing systems are becoming more sophisticated and expensive, particularly with the development of the intelligent industry. The complexity of the architecture and concept of Smart Manufacturing (SM) makes it vulnerable to several faults and failures that impact the entire behavior of the manufacturing system. It is crucial to find and detect any potential anomalies and faults as soon as possible because of the low tolerance for performance deterioration, productivity decline, and safety issues. To overcome these issues, a variety of approaches exist in the literature. However, the multitude of techniques make it difficult to choose the appropriate method in relation to a given context. This paper proposes a new architecture for a conceptual model of intelligent fault diagnosis and self-healing for smart manufacturing systems. Based on this architecture, a review method for the different approaches, sub-approaches and methods used to develop a Fault Detection and Diagnosis (FDD) and Self-Healing-Fault-Tolerant (SH-FT) strategy dedicated to smart manufacturing is defined. Moreover, this paper reviews and analyzes more than 256 scientific articles on fault diagnosis and self-healing approaches and their applications in SM in the last decade. Finally, promising research directions in the field of resilient smart manufacturing are highlighted.