SOI-based fabrication processes of the scanning mirror having vertical comb fingers

Lee, Jinho; Ko, Young-Chul; Jeong, Hee-Moon; Choi, Byung-Soon; Kim, Jong Min; Jeon, Duk Young

doi:10.1016/s0924-4247(02)00389-8

Cited by 36 publications

(16 citation statements)

References 16 publications

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“…Advantages of using a SOI-based bulk microfabrication process are: Excellent mechanical properties, such as high yield strength, low residual stress and good fatigue resistance, and improvement of reliability [18]. Fig.…”

Section: B Silicon-on-insulator (Soi)-based Microfabrication Techniquementioning

confidence: 99%

Design, Fabrication, and Control of MEMS-Based Actuator Arrays for Air-Flow Distributed Micromanipulation

Fukuta

Chapuis

Mita

et al. 2006

J. Microelectromech. Syst.

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This paper reports the design, fabrication and control of arrayed microelectromechanical systems (MEMS)-based actuators for distributed micromanipulation by generation and control of an air-flow force field. The authors present an original design of pneumatic microactuator, improving reliability and durability of a distributed planar micromanipulator described in the previous study. The fabrication process is based on silicon-on-insulator (SOI) wafer and HF (hydroflouric acid) vapor release, which also significantly increases the production yield of the 560 microactuator array device of 35 35 mm 2 . Minimization of the electrostatic actuation pull-in voltage through suspension shaping fabrication was also studied, and successfully validated for electrical efficiency improvement. A distributed control method to achieve good conveyance performance and reduce motion control instability was investigated. An emulation approach was chosen to validate a decentralized control strategy on the distributed active surface in order to conduct a proof-of-concept of a future smart structure, integrating sensors, intelligence, and microactuators. Thus, a centralized/decentralized control flow, inspired by autonomous mobile robot principles, was applied. It was modeled and implemented using C-programming language. Experimental and characterization results validate the control method for feedback micromanipulation with good velocity and load capacity performance.[1605]

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Section: B Silicon-on-insulator (Soi)-based Microfabrication Techniquementioning

confidence: 99%

Design, Fabrication, and Control of MEMS-Based Actuator Arrays for Air-Flow Distributed Micromanipulation

Fukuta

Chapuis

Mita

et al. 2006

J. Microelectromech. Syst.

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“…Electrostatic actuation is commonly used for MEMS, including scanning mirrors [7,8,11,[18][19][20], with the two basic configurations being gap-closing and comb-drive. The large displacements required of the printer scanning mirror do not easily permit small gaps for either configuration, and so the actuation voltages would be unreasonably high.…”

Section: Actuator Selectionmentioning

confidence: 99%

High-performance silicon scanning mirror for laser printing

Davis

Brown

Helsel

et al. 2007

MOEMS and Miniaturized Systems VI

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This paper describes the design, fabrication, and characterization of the first MEMS scanning mirror with performance matching the polygon mirrors currently used for high-speed consumer laser printing. It has reflector dimensions of 8mm X 0.75mm, and achieves 80º total optical scan angle at an oscillation frequency of 5kHz. This performance enables the placement of approximately 14,000 individually resolvable dots per line at a rate of 10,000 lines per second, a recordsetting speed and resolution combination for a MEMS scanner. The scanning mirror is formed in a simple microfabrication process by gold reflector deposition and patterning, and through-wafer deep reactive-ion etching. The scanner is actuated by off-the-shelf piezo-ceramic stacks mounted to the silicon structure in a steel package. Device characteristics predicted by a mathematical model are compared to measurements.

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“…In addition, the misalignment between these two layers is a challenge (Jeong and Lee 2005;Tsou et al 2005;Chung and Hsu 2008;Zhang et al 2005;Hah et al 2004b;Ki-Hun and Lee 2003). Various methods were used to overcome or avoid misalignment (Krishnamoorthy et al 2003;Zhang et al 2005;Hah et al 2004b;Ki-Hun and Lee 2003;Kwon et al 2004;Conant et al 2000;Lee et al 2002). These methods are complex and of high cost (Selvakumar and Najaf 2003;Tsou et al 2005;Kwon et al 2004;Conant et al 2000).…”

Section: Introductionmentioning

confidence: 99%