SOI Based Micro-Bead Catalytic Gas Sensor

Samotaev, Nikolay; Pisliakov, A.V.; Filipchuk, Dmitry; Etrekova, Maya; Bíró, Ferenc; Dücső, Csaba; Bársony, I.

doi:10.1007/978-3-030-58868-7_12

Cited by 4 publications

(5 citation statements)

References 10 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…We designed and manufactured 300 × 500 µm 2 full membrane type microhotplates with 150 µm diameter identical Pt heaters in their centers as a MEMS silicon chip to satisfy the above power dissipation and temperature uniformity requirements. In order to verify the achieved results of the planar sensors and further characterize the catalyst, a conventional "bulk" wire bead type thermocatalytic sensor was also fabricated (the same type as widely present on the market [19] and used in research purposes [13][14][15]). In the following section we describe the important components from which the sensor was made.…”

Section: Methodsmentioning

confidence: 99%

“…The thermocatalytic sensor is still preferred in alarm systems for measuring combustible gases below LEL concentrations in coal mines, around land pipelines and in the oil refinery industry. Modern research is focusing on the miniaturization of the sensors [14,15], reducing the energy consumption [16] and increasing the stability of the catalysts to provide stable sensitivity in long term [17]. As the thermocatalytic sensor technology has been used in its current form since the beginning of the 1950s [18], they are now going to be outdated in view of their energy consumption and the related encapsulation requirements as well as the latest technology improvements.…”

Section: Introductionmentioning

confidence: 99%

“…Currently, the power consumption of the best bead type thermocatalytic sensor is at least 140 mW for the two sensors, using 10 µ Pt wires covered by 2 µ SiO 2 glass [19], but the typical bead type of the sensors on the market are made from non-covered 20 µ Pt wire [20] and have 190 mW power consumption at 450 • C constant working temperature. Three ways are seen to reduce the power consumption: improving the technology of the microhotplate platforms to get a uniform temperature profile at the lowest temperature needed for the catalysis and achieve it by minimum power dissipation [21][22][23][24], increasing the catalyst activity and stability of the gas sensing material [15,18], or by using non stationary methods for measuring flammable gas concentrations in pulsed temperature mode [21,25]. The present work describes the progress in these fields, aiming at the development of a battery-operated wearable methane sensor by introducing a reduced power dissipation hotplate and an SMD compatible ceramic encapsulation technique.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Silicon MEMS Thermocatalytic Gas Sensor in Miniature Surface Mounted Device Form

et al. 2021

Self Cite

View full text Add to dashboard Cite

A reduced size thermocatalytic gas sensor was developed for the detection of methane over the 20% of the explosive concentration. The sensor chip is formed from two membranes with a 150 µm diameter heated area in their centers and covered with highly dispersed nano-sized catalyst and inert reference, respectively. The power dissipation of the chip is well below 70 mW at the 530 °C maximum operation temperature. The chip is mounted in a novel surface mounted metal-ceramic sensor package in the form-factor of SOT-89. The sensitivity of the device is 10 mV/v%, whereas the response and recovery times without the additional carbon filter over the chip are <500 ms and <2 s, respectively. The tests have shown the reliability of the new design concerning the hotplate stability and massive encapsulation, but the high degradation rate of the catalyst coupled with its modest chemical power limits the use of the sensor only in pulsed mode of operation. The optimized pulsed mode reduces the average power consumption below 2 mW.

show abstract

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Silicon MEMS Thermocatalytic Gas Sensor in Miniature Surface Mounted Device Form

et al. 2021

Self Cite

View full text Add to dashboard Cite

show abstract

“…Due to the high sensitivity of the SOI-based ring resonator, a small change in gas composition or other parameters results in a shift in the resonant frequency of the sensing element, which can be detected by monitoring the oscillatory radio frequency peak at the output of the optoelectronic oscillator (OEO). In particular, SOI μ-resonators have shown that they can effectively respond to changes in gas composition [ 13 , 39 , 40 , 41 ].…”

Section: Introductionmentioning

confidence: 99%

Enhancing the Performance of the Photonic Integrated Sensing System by Applying Frequency Interrogation

et al. 2023

View full text Add to dashboard Cite

Lab-on-a-chip systems are currently one of the most promising areas in the development of ultra-compact sensor systems, used primarily for gas and liquid analysis to determine the concentration of impurities. Integrated photonics is an ideal basis for designing “lab-on-a-chip” systems, advantageous for its compactness, energy efficiency, and low cost in mass production. This paper presents a solution for “lab-on-a-chip” device realization, consisting of a sensor and an interrogator based on a silicon-on-insulator (SOI) integrated photonics platform. The sensor function is performed by an all-pass microring resonator (MRR), installed as a notch filter in the feedback circuit of an optoelectronic oscillator based on an electro-optic phase modulator. This structure realizes the frequency interrogation of the sensor with high accuracy and speed using a conventional single-mode laser source. The system sensitivity for the considered gases is 13,000 GHz/RIU. The results show that the use of frequency interrogation makes it possible to increase the intrinsic LoD by five orders. The proposed solution opens an opportunity for fully integrated implementation of a photonic “laboratory-on-a-chip” unit.

show abstract

“…Современные исследования термокаталитических сенсоров сосредоточены на уменьшении размеров датчиков [15,16], снижении их энергопотребления [17] и повышении стабильности используемых катализаторов для обеспечения стабильной чувствительности в долгосрочной перспективе [18]. В частности, использование МЭМС и различных технологий осаждения каталитического материала помогло значительно уменьшить энергопотребление датчиков [14,19,20].…”

Section: Introductionunclassified

Термокаталитический Газовый Сенсор На Основе Наночастиц Палладия, Синтезируемых Методом Искровой Абляции

Vlasov¹,

Kornyushin²,

Kameneva³

et al. 2022

MIST

View full text Add to dashboard Cite

Продемонстрирована возможность изготовления термокаталитических газовых сенсоров с каталитическим слоем на основе наночастиц палладия, синтезируемых методом искровой абляции с использованием слитков палладия чистотой 99,96 масс.% в качестве исходного материала. Для реализации сенсора использована коммерчески доступная МЭМС платформа на основе тонкой мембраны из стеклокерамики толщиной 50–60 мкм с интегрированным микронагревателем. Синтезированные наночастицы в составе устойчивых функциональных чернил с концентрацией порядка 25 масс.% наносились на обратную относительно микронагревателя сторону мембраны с помощью специализированного микроплоттера SonoPlot GIX Microplotter II. Полученная структура отжигалась при температуре 400 °C для удаления органического связующего из сухого остатка нанесенных чернил, в результате чего на поверхности мембраны формировался однородный слой каталитически активного материала толщиной около 3 мкм. Сенсор, реализованный на основе двух МЭМС платформ (одна – с каталитическим слоем, вторая – исходная (без слоя)), включенных в мостовую схему, демонстрирует высокую чувствительность к метану (50 мВ на 1% метана) при полной потребляемой мощности порядка 350 мВт, что сопоставимо с характеристиками коммерческих аналогов, производимых Figaro USA Inc., SGX Sensortech, Zhengzhou Winsen Electronics Technology Co.

show abstract

SOI Based Micro-Bead Catalytic Gas Sensor

Cited by 4 publications

References 10 publications

Silicon MEMS Thermocatalytic Gas Sensor in Miniature Surface Mounted Device Form

Silicon MEMS Thermocatalytic Gas Sensor in Miniature Surface Mounted Device Form

Enhancing the Performance of the Photonic Integrated Sensing System by Applying Frequency Interrogation

Термокаталитический Газовый Сенсор На Основе Наночастиц Палладия, Синтезируемых Методом Искровой Абляции

Contact Info

Product

Resources

About