SOI structure employed area dependant capacitive MEMS accelerometer with novel C–V converter

Solai, Kannan; Rathnasami, Joseph Daniel; Sumangala, K.

doi:10.1007/s00542-022-05278-9

Cited by 4 publications

(6 citation statements)

References 19 publications

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“…One simple method to increase the sensitivity of MEMS accelerometers is to mechanically amplify the output i.e. to increase movement of the proof mass with same acceleration [21][22][23][24]. Finite element analysis (FEA) is used to estimate the movement of mass proof due to the influence of acceleration on the structure in any directions.…”

Section: Finite Element Analysismentioning

confidence: 99%

“…The output voltage swing for an acceleration value of 0-1g using the circuit 1 is measured as 3.6 V. The second readout circuit used to realize C-V translation is shown in Fig. 7 [21]. It consists of a half bridge circuit and a phase sensitive rectifier (PSR) made by a CMOS pair.…”

Section: Readout Circuitmentioning

confidence: 99%

“…The major benefits of these type accelerometers are strong linearity in displacement variation with capacitance and a wide range of displacement for its operation in an open-loop arrangement, although their manufacturing is a bit complicated. Numerous area change based capacitive accelerometers have recently been produced and described in the literatures [20][21]. By employing a CMOS MEMSbased approach, the microstructure and necessary electronics circuits may be simply constructed on a single wafer.…”

Section: Introductionmentioning

confidence: 99%

“…The signal conditioning circuit might convert a change in capacitance to an equivalent change in voltage. A capacitance-tovoltage converter [21] is one of the most often used signal conditioning circuits for MEMS capacitive accelerometers. It applies driving voltage to both sides of the sensor capacitors and amplifies the voltage at the center node to provide output voltage.…”

Section: Introductionmentioning

confidence: 99%

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Design and performance analysis of a MEMS Based Area-Variation Capacitive Accelerometer with Readout Circuit

Raha Patra,

Biswas

2024

JICS

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The structural optimization of the device is used in the present work to demonstrate the improvement of the device sensitivity for a MEMS accelerometer based on capacitive principle due to overlap area change between electrodes. The proof mass of the device is made up of a few parallel fingers those are joined together. Proof mass is supported by flexible mechanical beams that resemble springs is suspended over fixed electrodes and are fastened to the substrate. The greatest displacement that the proof mass can suffer with application of acceleration is determined for the specific construction. The connected beams' width and length were changed, and ANSYS FEA software was used to model the reaction. Sensitivity of the device is analyzed and discussed based on the findings of various device geometry measurements, and suggestions for improving sensitivity are also made. Additionally, a signal conditioning circuit that changes the capacitance to voltage as a result of the proof mass deflecting differently is described. These discoveries might help designers to create capacitive MEMS accelerometers with increased sensitivity.

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Section: Finite Element Analysismentioning

confidence: 99%

Section: Readout Circuitmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Design and performance analysis of a MEMS Based Area-Variation Capacitive Accelerometer with Readout Circuit

Raha Patra,

Biswas

2024

JICS

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“…At present, MEMS accelerometers are widely used in the fields of smartphones, automotive electronics and seismic and structural health detection [ 1 , 2 , 3 , 4 , 5 ]. Different types of acceleration detection have been used, such as optical [ 6 ], capacitance [ 7 ], piezoresistive [ 8 ], piezoelectric [ 9 ] and so on [ 10 , 11 ].…”

Section: Introductionmentioning

confidence: 99%

Design and Demonstration of an In-Plane Micro-Optical-Electro-Mechanical-System Accelerometer Based on Talbot Effect of Dual-Layer Gratings

Chen

Wang

et al. 2023

Micromachines

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An ultrasensitive single-axis in-plane micro-optical-electro-mechanical-system (MOEMS) accelerometer based on the Talbot effect of dual-layer gratings is proposed. Based on the Talbot effect of gratings, the acceleration can be converted into the variation of diffraction intensity, thus changing the voltage signal of photodetectors. We investigated and optimized the design of the mechanical structure; the resonant frequency of the accelerometer is 1878.9 Hz and the mechanical sensitivity is 0.14 μm/g. And the optical grating parameters have also optimized with a period of 4 μm and a grating interval of 10 μm. The experimental results demonstrated that the in-plane MOEMS accelerometer with an optimal design achieved an acceleration sensitivity of 0.74 V/g (with better than 0.4% nonlinearity), a bias stability of 75 μg and an acceleration resolution of 2.0 mg, suggesting its potential applications in smartphones, automotive electronics, and structural health detection.

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Modelling and optimization of compound lever-based displacement amplifier in a MEMS accelerometer

Jani,

Tirupathi,

Menon

et al. 2024

Microsyst Technol

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SOI structure employed area dependant capacitive MEMS accelerometer with novel C–V converter

Cited by 4 publications

References 19 publications

Design and performance analysis of a MEMS Based Area-Variation Capacitive Accelerometer with Readout Circuit

Design and performance analysis of a MEMS Based Area-Variation Capacitive Accelerometer with Readout Circuit

Design and Demonstration of an In-Plane Micro-Optical-Electro-Mechanical-System Accelerometer Based on Talbot Effect of Dual-Layer Gratings

Modelling and optimization of compound lever-based displacement amplifier in a MEMS accelerometer

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