Sol-gel deposition and plasma treatment of intrinsic, aluminum-doped, and gallium-doped zinc oxide thin films as transparent conductive electrodes

Zhu, Zhaozhao; Mankowski, Trent; Balakrishnan, Kaushik; Shikoh, Ali Sehpar; Touati, Farid; Benammar, Mohieddine; Mansuripur, Masud; Falco, Charles M.

doi:10.1117/12.2186144

Cited by 9 publications

(5 citation statements)

References 4 publications

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“…The above results and analyses demonstrate that BiCl 3 significantly improved the electrical conductivity of Bi 2 S 3 thin films, and the highest electrical conductivity of 52.48 S cm –1 was observed at a BiCl 3 content of 0.5 mmol. Additionally, it has been shown in several previous studies that the post-treatment of semiconductor films can considerably reduce their resistivity. ,− Therefore, to further improve the electrical conductivity of the films and optimize their thermoelectric performance, we investigated the effect of different PT times with air on the TE properties of Bi 2 S 3 thin films doped with 0.5 mmol BiCl 3 . It is important to note that all results presented henceforth are for the same type of films.…”

Section: Results and Discussionmentioning

confidence: 99%

Realizing High Electrical Conductivity in Chlorine-Doped Bi₂S₃ Thermoelectric Thin Films via Air Plasma Treatment

Hu,

Zhao,

et al. 2023

ACS Materials Lett.

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The demand for a sustainable power supply and management has become increasingly essential with the rise of Internet of Things (IoT) devices and the associated wireless sensor networks. Inorganic thermoelectric thin films, such as those based on Bi 2 S 3 , are becoming a viable solution to this issue as they are low-toxic, inexpensive, and possess a high Seebeck coefficient and low thermal conductivity. However, they usually suffer from an inherent low electrical conductivity. In this study, we tackled this problem by incorporating Cl into Bi 2 S 3 lattices using a solution process, resulting in a substantial increase in both the conductivity and carrier concentration. Additionally, DFT calculations show that the doping of Cl leads to the formation of a degenerate semiconductor, which increases conductivity. Moreover, a high power factor of 121.88 μW m −1 K −2 was achieved after doping before plasma treatment. Specifically, the Bi 2 S 3 sample doped with 0.5 mmol of BiCl 3 with plasma treatment achieved a remarkable conductivity of 100.72 S cm −1 , among the highest reported for a Bi 2 S 3 -based system, which is attributed to the sharp increase of carrier concentration. This research demonstrates a promising approach for overcoming the inherently low conductivity of Bi 2 S 3 -based thermoelectric thin films to enable them as a viable solution for low-cost power supply in IoT applications.

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Section: Results and Discussionmentioning

confidence: 99%

Realizing High Electrical Conductivity in Chlorine-Doped Bi₂S₃ Thermoelectric Thin Films via Air Plasma Treatment

Hu,

Zhao,

et al. 2023

ACS Materials Lett.

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“…In the present study, nanopatterns were transferred using the UV-NIL method, wherein the patterns are cured with UV radiation to produce the LC alignment layers . For high-quality LC alignment layers, transparent conducting oxides (TCOs) with excellent transmittances are mixed with a UV-cured polymer to prepare a hybrid solution. − In the present work, gallium oxide (GaO) was used as the TCO; GaO is a popular choice because it has a wide band gap and can produce single-crystal substrates. − In this paper, we studied whether high-quality nanopattern transitions can be obtained while reducing the process steps of the NIL process through mixing these inorganic materials and polymers. The hybrid solution was coated on a glass substrate and cured by UV irradiation to prepare the nanopattern, and the nanopattern and LC alignment characteristics were analyzed by varying the UV curing time.…”

Section: Introductionmentioning

confidence: 99%

Nanopatterning of Polymer/Gallium Oxide Thin Films by UV-Curing Nanoimprint Lithography for Liquid Crystal Alignment

Kim

Lee

et al. 2022

ACS Appl. Nano Mater.

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A liquid crystal (LC) alignment layer was created using the nanoimprint lithography method and ultraviolet (UV) curing. A hybrid film of a solution of gallium oxide (GaO) and a UV-curing polymer was coated on a substrate and cured by UV irradiation. After that, an LC cell was manufactured by assembling two films by an antiparallel method. The LC orientation characteristics and the surface were analyzed by varying the curing time. The molecular composition of the coated film surface was confirmed via X-ray photoelectron spectroscopy, and nanopattern formation was observed through atomic force microscopy. The LC alignment characteristics were analyzed by polarized optical microscopy and pretilt angle measurements, and thermal stability tests were performed. It was confirmed that the refractive index anisotropy and van der Waals forces based on the nanopattern formation enabled a homogeneous and uniform alignment of the LC molecules; further, it was found that the GaO hybrid film was suitable for use as an LC alignment layer.

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“…Given their high transparency and distinct electrical characteristics, inorganic and ceramic materials have been widely used to assemble high-quality optic and electronic devices, such as metal-oxide-semiconductor field-effect transistors (MOSFETs), , thin-film transistors, and solar cells . In this viewpoint, zinc oxide has good optical (a wide optical band gap of 3.4 eV and high transparency) and electrical characteristics (high thermal and mechanical stability and non-toxicity − ); moreover, its transparency and conductivity can be controlled by doping with other impurities such as Al, Ga, and In. − Hence, ZnO is widely used in various areas including the optoelectronics of light emitters, sensors, and solar cells and the biocompatible application of electrochemical biosensors …”

Section: Introductionmentioning

confidence: 99%

“…Transparent inorganic materials can be produced via several methods, such as spray pyrolysis, sol–gel processing, evaporation, sputtering, and chemical vapor deposition . Among them, sol–gel processing is one of the most attractive methods because it is based on a non-vacuum system and a liquid-phase process, and the equipment is relatively low cost compared with that required for vacuum deposition.…”

Section: Introductionmentioning

confidence: 99%

“…17−19 Hence, ZnO is widely used in various areas including the optoelectronics of light emitters, 20 sensors, 21 and solar cells 22 and the biocompatible application of electrochemical biosensors. 23 Transparent inorganic materials can be produced via several methods, such as spray pyrolysis, 18 sol−gel processing, 19 evaporation, 24 sputtering, 25 and chemical vapor deposition. 26 Among them, sol−gel processing is one of the most attractive methods because it is based on a non-vacuum system and a liquid-phase process, and the equipment is relatively low cost compared with that required for vacuum deposition.…”

Section: Introductionmentioning

confidence: 99%

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Solution-Driven Imprinting Lithography of Sol–Gel ZnO Thin Films for Liquid Crystal Display

et al. 2022

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We present a simple and economically convenient method to fabricate nanopatterned ZnO films by imprinting lithography and use them for the layer alignment of liquid crystal (LC) displays. First, a one-dimensional nanopattern was obtained by laser interference lithography on a silicon wafer, and the silicon mold replica was transferred onto a flexible polydimethylsiloxane (PDMS) sheet for conformal patterning. The so-obtained PDMS mold was then applied on a ZnO film spin-coated on a glass substrate. During the imprinting process, the temperature was controlled from 100 to 250 °C to observe the transferring morphologies of the ZnO film; the nanopattern was successfully transferred at annealing temperatures of 200 and 250 °C because the ZnO film at the sol state filled the cavities of the PDMS nanopattern and solidified, forming a negative replica of the nanopattern. The direction of the nanopatterned ZnO film served as a guide for aligning the LC molecules on the LC surface at the centimeter scale and, due to their elastic characteristics and group behavior, propagating their directional states in the LC bulk. The resulting LC cell exhibited an enhanced electro-optical performance and high thermal endurance above 180 °C. The geometry of the alignment layer increased the electric field on the ZnO film and showed reduced threshold voltage. In addition, since flexible devices are generally based on polyimide, which imidized at around 200 °C, the relatively low annealing temperatures of our fabricated nanopatterned ZnO film allow it to be mounted on such devices without any deterioration of the underlying thermoplastic substrate. Therefore, nanopatterned ZnO has a considerable potential for advanced LC displays.

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Sol-gel deposition and plasma treatment of intrinsic, aluminum-doped, and gallium-doped zinc oxide thin films as transparent conductive electrodes

Cited by 9 publications

References 4 publications

Realizing High Electrical Conductivity in Chlorine-Doped Bi₂S₃ Thermoelectric Thin Films via Air Plasma Treatment

Realizing High Electrical Conductivity in Chlorine-Doped Bi₂S₃ Thermoelectric Thin Films via Air Plasma Treatment

Nanopatterning of Polymer/Gallium Oxide Thin Films by UV-Curing Nanoimprint Lithography for Liquid Crystal Alignment

Solution-Driven Imprinting Lithography of Sol–Gel ZnO Thin Films for Liquid Crystal Display

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Sol-gel deposition and plasma treatment of intrinsic, aluminum-doped, and gallium-doped zinc oxide thin films as transparent conductive electrodes

Cited by 9 publications

References 4 publications

Realizing High Electrical Conductivity in Chlorine-Doped Bi2S3 Thermoelectric Thin Films via Air Plasma Treatment

Realizing High Electrical Conductivity in Chlorine-Doped Bi2S3 Thermoelectric Thin Films via Air Plasma Treatment

Nanopatterning of Polymer/Gallium Oxide Thin Films by UV-Curing Nanoimprint Lithography for Liquid Crystal Alignment

Solution-Driven Imprinting Lithography of Sol–Gel ZnO Thin Films for Liquid Crystal Display

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Realizing High Electrical Conductivity in Chlorine-Doped Bi₂S₃ Thermoelectric Thin Films via Air Plasma Treatment

Realizing High Electrical Conductivity in Chlorine-Doped Bi₂S₃ Thermoelectric Thin Films via Air Plasma Treatment