Sol–gel derived nanocrystalline titania thin films on silicon

Abstract

Electrical characteristics of sol-gel derived titanium dioxide (TiO 2 ) as insulating layers were investigated by making capacitance and leakage current measurements in metal-insulator-semiconductor configurations. The structure was fabricated by depositing 37 nm thick anatase TiO 2 films on p-type silicon (p-Si) substrates. The frequency dispersion of capacitance was attributed to the leaky behaviour of the TiO 2 dielectrics. Using an equivalent circuit, values of the frequency-independent dielectric constant, interfacial surface density and threshold voltage were estimated to be 13, 3 × 10 14 m −3 and −0.085 V, respectively. The carrier diffusion was found to be primarily responsible for the diode leakage current at room temperature but the increase in the ideality factor with lowering temperature was believed to be due to fluctuations of barrier height at the TiO 2 /p-Si interface.

Novel Binary Calcia–Alumina Systems for Device Applications

“…where βf is the full width at half maximum and d is the corresponding d-value at the Bragg angle θ [101], [102]. The values of lattice strain and crystallite size for samples heat treated at temperature rang of 800°C-1200°C are schematically compared in figure 5.8 and 5.9, respectively.…”

“…Such increase in the grain size was predictable since increasing annealing temperature will improve the conditions for the crystal growth. As a fact higher temperatures will facilitate crystal growth and will result in larger grain size [102].…”

Influence of precursor type on structural, morphological, dielectric and magnetic properties of TiO2 nanoparticles

“…Considering the advantages and disadvantages of these methods, sol-gel process has been chosen as the most important process because of its low reaction temperature, narrow range of particle size distribution, controllable particle-size, low cost and ease of processing for the preparation of TiO 2 nanoparticles (NPs) [13]. For example, TiO 2 NPs were synthesized employing sol-gel technique from titanium tetraisopropoxide with crystal size of approximately 20 nm containing anatase and rutile mixed phases [14].…”

Spectroscopic Investigation on Sol Gel Derived TiO₂ Nanoparticles

“…Different techniques have been used for the preparation of TiO 2 nanoparticles, which include sol-gel, different forms of sputtering from metallic and ceramic targets, electron beam evaporation, pulsed laser deposition and chemical vapour deposition. Considering the advantages and disadvantages of these methods, sol-gel process has been chosen as the most important process because of its low reaction temperature, narrow range of particle distribution, controllable particle-size, low cost and ease of processing for the preparation of TiO 2 nanoparticles [10].…”