1997
DOI: 10.1021/cm970229m
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Sol−Gel Replication of Microoptical Elements and Arrays

Abstract: Facile replication of microoptical elements and arrays was performed in sol-gel matrixes prepared by the fast sol-gel method. These sol-gel resins, made from mixtures of alkylalkoxysilane monomers, undergo hydrolysis and polymerization within 10-20 min and curing within a few days. Single-step reproducible fabrication of large crack-free elements of 1 cm thickness and up to 10 cm in diameter was demonstrated. High accuracy of replication was facilitated by maintaining a very small shrinkage of only a few perce… Show more

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Cited by 17 publications
(14 citation statements)
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“…The following sol-gel materials obtained by using different catalysts were chosen for investigation: (i) five sol-gel glasses prepared by the regular way and (ii) four fast solgel glasses produced via the fast sol-gel route [8].…”
Section: Sol-gel Sample Preparationmentioning
confidence: 99%
“…The following sol-gel materials obtained by using different catalysts were chosen for investigation: (i) five sol-gel glasses prepared by the regular way and (ii) four fast solgel glasses produced via the fast sol-gel route [8].…”
Section: Sol-gel Sample Preparationmentioning
confidence: 99%
“…Resin Fabrication: The chemicals and preparation procedure involved in fabricating the fast-sol-gel-derived resins are described in detail elsewhere [1][2]. The general procedure comprises (1) admixing of methyltrimethoxy-silane (MTMS) with 0-30 % of tetramethylortho-silicate (TMOS) and dimethyldimethoxysilane (DMDMS); (2) rapid addition of aqueous HCl (5*10 -3 M) or HF (1-5 M), adjusted so that 1.5 moles water are added per each mole silane; (3) 10 min stirring (sealed reaction bottle) at 100 C followed by gradual opening the reaction bottle (during ca.…”
Section: Methodsmentioning
confidence: 99%
“…It allows facile fabrication of siloxane-backbone glassy materials within min-utes of reaction and a few hours of curing at temperatures of 65-140 o C. These glassy materials are tailorable to a wide variety of specific objectives, monoliths, composites, coatings, sealants, and micro-optical elements and arrays. Coatings made from such resins readily adhere to most surfaces and form chemical bonds with oxide-covered ones [2].…”
Section: Introductionmentioning
confidence: 99%
“…Sol-gel processing has been shown, in general, to be well adapted for fabrication of several types of micro-optic elements [203][204][205] such as diffraction gratings, 206 Fresnel lenses 207 and microlens arrays. Microlens arrays, in particular, are formed by multiple lenses which are aligned on a supporting substrate and are used in photonics for the optical interconnections between optical fibers and light-emitting or detecting devices.…”
Section: Micro-optic Elementsmentioning
confidence: 99%