Thins films of lanthanum phosphate (LaPO4) were fabricated on glass substrate using successive layer by layer (LbL) assembly method subsequent with furnace annealing. Lanthanum Phosphate (LaPO4) thin films were prepared through sol gel and spin coating technique from lanthanum nitrate and ammonium phosphate in ammonia solution. The surface morphology of films was studied through Atomic Force Microscopy (AFM). The images of LaPO4 films had a RMS roughness below 50 nm and showed some aggregates. With increasing layers of LaPO4, thus the surface roughness become thickest starts with range 13.926 nm to 33.020 nm. Two peaks, 448 and 465 nm is located in a blue-violet spectrum area.