2018
DOI: 10.1134/s1070363218020263
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Sol-Gel Synthesis of TiO2 Mesoporous Thin Films on Silicon

Abstract: Abstract-Conditions were determined for the synthesis of TiO 2 mesoporous thin films on silicon by the solgel method in the version of coating by dipping silicon plates in a TiO 2 sol (dip-coating).

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Cited by 4 publications
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“…Therefore, TiO 2 thin film fabrication is continuously conducted to obtain better film characteristics. Several methods used in the synt-hesis of TiO2 are sol gel methods [3,4], solvotermal [5], thermal decomposition [6] and hydrothermal [7][8][9]. The hydrothermal method has the advantage of simple preparation, relatively low reaction temperature, uniform dispersion for metal ion doping, as well as stoichiometric control and provides good homogeneity [10][11][12] although method usually proceeds for a relatively long time (~ 10 h).…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, TiO 2 thin film fabrication is continuously conducted to obtain better film characteristics. Several methods used in the synt-hesis of TiO2 are sol gel methods [3,4], solvotermal [5], thermal decomposition [6] and hydrothermal [7][8][9]. The hydrothermal method has the advantage of simple preparation, relatively low reaction temperature, uniform dispersion for metal ion doping, as well as stoichiometric control and provides good homogeneity [10][11][12] although method usually proceeds for a relatively long time (~ 10 h).…”
Section: Introductionmentioning
confidence: 99%