2008
DOI: 10.1063/1.2895643
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Solar-blind AlGaN-based p-i-n photodetectors with high breakdown voltage and detectivity

Abstract: High-performance metal-semiconductor-metal deep-ultraviolet photodetectors based on homoepitaxial diamond thin film

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Cited by 113 publications
(71 citation statements)
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“…Thus, the PDs are desired to have both large detector area and low dark current, which are nevertheless hard to be realised simultaneously. In past studies, small-area AlGaN-based solar-blind PDs with low dark current density and high signal-to-noise ratio have been reported [2][3][4][5]. Although there are limited reports on AlGaN-based solar-blind Schottky PDs with active area of more than 1 mm 2 , those devices suffer from high leakage current owing to material quality or uniformity-related issues [6].…”
mentioning
confidence: 98%
“…Thus, the PDs are desired to have both large detector area and low dark current, which are nevertheless hard to be realised simultaneously. In past studies, small-area AlGaN-based solar-blind PDs with low dark current density and high signal-to-noise ratio have been reported [2][3][4][5]. Although there are limited reports on AlGaN-based solar-blind Schottky PDs with active area of more than 1 mm 2 , those devices suffer from high leakage current owing to material quality or uniformity-related issues [6].…”
mentioning
confidence: 98%
“…The direct bandgap AlGaN material is tunable from its binary alloy from 3.4 eV (GaN) to 6.2 eV (AlN) at room temperature enables the wide spectrum coverage from blue to UVC. [97][98][99][100][101]114,115) The past 20 years have witnessed the improvement in AlGaN based PDs with different device configurations of metalsemiconductor-metal (MSM), PN heterostructure, PIN, and Schottky diodes. 90,94) The bandwidth can reach GHz range.…”
Section: Detectorsmentioning
confidence: 99%
“…Table II summarizes the performance of semiconductor based solar-blind PDs. 88,[96][97][98][99][100][101][102][103][104][105][106][107][108][109][110][111][112][113] The table is ordered by the use of different groups of materials. As indicated in the table, III-nitride based PDs are among the first and ideal choices for high efficiency and high-speed devices.…”
Section: Detectorsmentioning
confidence: 99%
“…Recent researches on AlGaN SBDs have demonstrated encouraging results in terms of low dark current, high response speed and high detectivity in the Schottky barrier, 1 Schottky based metal-semiconductor-metal, 2 and p-i-n type photodiodes. 3,4 However, in order to replace the current market-dominant photomultiplier tubes, AlGaN-based SBDs must have high internal gain combined with low dark current and high response speed. Due to their high photocurrent gain and low dark current, photomultiplier tubes are sensitive enough to detect very weak solar-blind UV signal and are commonly used today.…”
mentioning
confidence: 99%