Off-stoichiometric silicon carbide (SiC), C-and Si-added SiC (6H, α-type), with an excess amount of C or Si from 1 to 5 mol%, were fabricated by spark plasma sintering at 2373 K and 50 MPa in a vacuum. The microstructure, electrical, and thermal properties of offstoichiometric SiC were investigated. The lattice parameters increased after the addition of C and Si, suggesting the formation of solid solutions of C and Si in SiC. The addition of C and Si increased the densification, while the addition of a small amount of Si (1 mol%) significantly improved the densification. The electrical conductivity (σ) of C-added SiC was 0.7-1.4 × 10 2 S m −1 at 298-1150 K. The Seebeck coefficient of C-added SiC changed from nto p-type with increasing addition of C, whereas that of Si-added SiC was almost independent of the amount of Si added. The thermal conductivity of C-and Si-added SiC was in the range of 180-250 W m −1 K −1 , which was greater than that of pristine SiC (100 W m −1 K −1 ) at room temperature.