2020
DOI: 10.3390/nano10122542
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Solid-State Dewetting Dynamics of Amorphous Ge Thin Films on Silicon Dioxide Substrates

Abstract: We report on the dewetting process, in a high vacuum environment, of amorphous Ge thin films on SiO2/Si (001). A detailed insight of the dewetting is obtained by in situ reflection high-energy electron diffraction and ex situ scanning electron microscopy. These characterizations show that the amorphous Ge films dewet into Ge crystalline nano-islands with dynamics dominated by crystallization of the amorphous material into crystalline nano-seeds and material transport at Ge islands. Surface energy minimization … Show more

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Cited by 8 publications
(4 citation statements)
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“…%, which is compatible with the decrease of b β and the increase of a β and c β in Figure e. As seen in Figure d, the RHEED pattern of sample #10 in the mixed phase exhibits the Debye ring, which indicates the polycrystal nature Figure e,f shows RHEED patterns of the rocksalt phase {111} plane along [10] azimuth of samples #19 and #20, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…%, which is compatible with the decrease of b β and the increase of a β and c β in Figure e. As seen in Figure d, the RHEED pattern of sample #10 in the mixed phase exhibits the Debye ring, which indicates the polycrystal nature Figure e,f shows RHEED patterns of the rocksalt phase {111} plane along [10] azimuth of samples #19 and #20, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…It has been recently studied and is well known, that thermal annealing results in thin-film transformation into droplets or islands 17 20 . The transformation mechanism is driven by thermally accelerated diffusion that leads to the minimalization of surface energy in the system 21 24 . However, there is no clearly explained, step by step, mechanism for this process, as well as no common terminology for it.…”
Section: Introductionmentioning
confidence: 99%
“…That process can be observed at temperatures well below the melting point of the nanolayer material, even at room temperature. The transformation mechanism is driven by a thermally accelerated diffusion that leads to the minimalization of surface free energy in the system [5][6][7][8]. Thin films, especially those with nanometer-scale thicknesses, have a relatively high surface energy and a large interfacial area with the substrate.…”
Section: Introductionmentioning
confidence: 99%