“…In the late 1960s, the use of silicon as a matrix for integrated sensor-transducer systems had begun [28,29]. Silicon-based devices for the in vivo measurement of electrophysiological measurements had already been developed.…”
“…In the late 1960s, the use of silicon as a matrix for integrated sensor-transducer systems had begun [28,29]. Silicon-based devices for the in vivo measurement of electrophysiological measurements had already been developed.…”
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