Solidly mounted resonators consisting of a molybdenum and titanium Bragg reflector

Wei, Ching-Liang; Chen, Ying–Chung; Cheng, Chien‐Chuan; Kao, K. C.

doi:10.1007/s00339-007-4312-2

Cited by 9 publications

(5 citation statements)

References 9 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Since longitudinal resonance vanished in a liquid environment, the longitudinal frequency drift could not be used to evaluate the TFBAR performance. The coupling coefficient, 2 , taken from the work of Bjurström et al and Wei et al [31,32], is expressed in terms of and as…”

Section: Sensitivity Of Dual-mode Tfbar In Liquid Environmentsmentioning

confidence: 99%

“…The mechanical quality factors ( for the longitudinal mode and for the shear mode) are the important parameters of dual-mode TFBAR devices in liquid environments. The mechanical quality factors ( and ) were defined in terms of the full width at half maximum (FWHM) of the resistance curve at resonance frequency [32] as follows:…”

Section: Sensitivity Of Dual-mode Tfbar In Liquid Environmentsmentioning

confidence: 99%

See 1 more Smart Citation

The Liquid Sensor Using Thin Film Bulk Acoustic Resonator with C‐Axis Tilted AlN Films

Chen

Chang

Kao

et al. 2013

Journal of Nanomaterials

Self Cite

View full text Add to dashboard Cite

Dual-mode thin film bulk acoustic resonator (TFBAR) devices are fabricated with c-axis tilted AlN films. To fabricate dual-mode TFBAR devices, the off-axis RF magnetron sputtering method for the growth of tilted piezoelectric AlN thin films is adopted. In this report, the AlN thin films are deposited with tilting angles of 15° and 23°. The frequency response of the TFBAR device with 23° tilted AlN thin film is measured to reveal its ability to provide dual-mode resonance. The sensitivities of the longitudinal and shear modes to mass loading are calculated to be 2295 Hz cm2/ng and 1363 Hz cm2/ng with the mechanical quality factors of 480 and 287, respectively. The sensitivities of the longitudinal and shear modes are calculated to be 0 and 15 Hz cm2/μg for liquid loading.

show abstract

Section: Sensitivity Of Dual-mode Tfbar In Liquid Environmentsmentioning

confidence: 99%

Section: Sensitivity Of Dual-mode Tfbar In Liquid Environmentsmentioning

confidence: 99%

The Liquid Sensor Using Thin Film Bulk Acoustic Resonator with C‐Axis Tilted AlN Films

Chen

Chang

Kao

et al. 2013

Journal of Nanomaterials

Self Cite

View full text Add to dashboard Cite

show abstract

“…Such a structure, known as a Bragg reflector (BR), drives internal acoustic reflection in the direction away from the substrate [11,12]. This technique has proven extremely effective for thin-film bulk acoustic resonators (FBARs) [13][14][15]. However, there is yet to be an investigation into the development of a microscale BR in the long wavelength limit (when the acoustic wavelength is comparable to, or greater than, the lateral dimensions of the BR).…”

Section: Introductionmentioning

confidence: 99%

A diameter 300 µm Bragg reflector for acoustic isolation of resonant micro-actuators

Rogers¹

2011

J. Micromech. Microeng.

View full text Add to dashboard Cite

This study provides a means of isolating the acoustic energy of a resonant micro-actuator from that of its surroundings, improving actuation efficiency and mitigating spurious vibrations. A commercial finite-element package is used to model a diameter 300 µm stainless-steel–nylon composite waveguide micro Bragg reflector, from which the optimum isolation parameters are inferred. A prototype is constructed and tested, producing acoustic isolation for a range of frequencies with a bandwidth of 380 kHz at a centre frequency of 520 kHz. Excellent quantitative agreement is found between the numerical and experimental findings, validating this new method of designing Bragg reflectors and demonstrating the potential to use these intermediary devices for micro-actuator isolation. This micro Bragg reflector will allow micro-actuators to be integrated with other systems, such as minimally invasive microsurgical equipment.

show abstract

“…The combinations are Si(SiO2)/(Ti/Ru)x3, Si(SiO2)/(Ti/W)x3, Si(SiO2)/(Mo/Ti)x3. Values for acoustic impedance, thermal expansion coefficient and corresponding layer thicknesses are found in table 1.Previous work has proven that, by increasing the number of repetitions of the two different acoustic impedance layers, an increase in acoustic insulation and quality factor of the resonances is observed 5 . We have chosen to settle for 3 repetitions as the benefit of increasing this number is only marginal 5 (loss of bandwith with higher number of repetitions).…”

mentioning

confidence: 97%

“…There have been reports of all metallic Bragg reflectors 5,6 , but no high frequency results on their resistivity have been reported, as they havent generally been used as bottom electrodes.…”

mentioning

confidence: 99%

Metallic multilayers for X-band Bragg reflector applications

Mihai,

Adabi,

Liu

et al. 2015

Preprint

View full text Add to dashboard Cite

Solidly mounted resonators consisting of a molybdenum and titanium Bragg reflector

Cited by 9 publications

References 9 publications

The Liquid Sensor Using Thin Film Bulk Acoustic Resonator with C‐Axis Tilted AlN Films

The Liquid Sensor Using Thin Film Bulk Acoustic Resonator with C‐Axis Tilted AlN Films

A diameter 300 µm Bragg reflector for acoustic isolation of resonant micro-actuators

Metallic multilayers for X-band Bragg reflector applications

Contact Info

Product

Resources

About