Solidly mounted ZnO shear mode film bulk acoustic resonators for sensing applications in liquids

Link, Mathias; Schreiter, Matthias; Weber, Jan; Primig, R.; Pitzer, D.; Gabl, R.

doi:10.1109/tuffc.2006.1593389

Cited by 93 publications

(38 citation statements)

References 17 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The serial resonance frequency was read-out by determining the frequency with the maximum electrical conductance. The Q-factor and the resulting dissipation D = 1/Q was determined following the formula Q s = fs 2 <Z df fs , where f s is the serial resonance frequency and <Z df fs the inclination of the electrical impedance at resonance (Link, 2006;Link et al, 2006b). The resonator characteristics such as electrical impedance, resonance frequency and mass sensitivity could be simulated using a one-dimensional transmission line model by Mason (Mason, 1950;Rosenbaum, 1988).…”

Section: Fbarmentioning

confidence: 99%

“…However, TSM resonators produced by thin-film technology, namely film bulk acoustic resonators (FBAR) have been produced just recently for the application in liquid (Link et al, 2006b;Bjurström et al, 2006;Dickherber et al, 2006). Thin film bulk acoustic resonators vibrating in longitudinal mode have been produced before e.g.…”

Section: Introductionmentioning

confidence: 99%

“…Piezoelectric thin-films with the c-axis being inclined from the film normal were developed to achieve sufficiently high piezoelectric shear coupling coefficients (Wang and Lakin, 1982;Carlotti et al, 1990;Akiyama et al, 2004;Martin et al, 2005;Wingqvist et al, 2005;Link et al, 2006b;Yanagitani et al, 2007;Fardeheb-Mammeri et al, 2008) While the working principle of FBAR and QCM is similar, the QCM is produced in a top-down process and FBARs in a bottom-up process using thinfilm technology. As a result FBARs can be made thinner, which results in a higher resonance frequency.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Comparison of FBAR and QCM-D sensitivity dependence on adlayer thickness and viscosity

Nirschl

Schreiter

Vörös

2011

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

Unlike the quartz crystal microbalance, which has been used extensively for the analysis of biochemical interactions, only few measurements with biochemical adsorbent have been done with film bulk acoustic resonators (FBAR). In this paper, the FBAR behaviour on exposure to a lipid vesicle solution and the formation of a polyelectrolyte multilayer structure is investigated and compared with the results obtained with the quartz crystal microbalance. Differences in the resonator response were found between the two techniques and depending on the resonators resonance frequency ranging from the MHz to the GHz regime. As an explanation, we suggest that the penetration depth and the influence on viscoelastic properties, which are both known to be frequency dependent, cause the variations in the results. As a consequence, the higher operating resonance frequencies of the FBAR increase the sensitivity to changes in the viscoelasticity of the adsorbent and also decrease the sensing length of the device. AbstractUnlike the quartz crystal microbalance, which has been used extensively for the analysis of biochemical interactions, only few measurements with biochemical adsorbent have been done with film bulk acoustic resonators (FBAR). In this paper, the FBAR behaviour on exposure to a lipid vesicle solution and the formation of a polyelectrolyte multilayer structure is investigated and compared with the results obtained with the quartz crystal microbalance. Differences in the resonator response were found between the two techniques and depending on the resonators resonance frequency ranging from the MHz to the GHz regime.As an explanation, we suggest that the penetration depth and the influence on viscoelastic properties, which are both known to be frequency dependent, cause the variations in the results. As a consequence, the operating resonance frequency was found to be an important parameter for the design of acoustic resonators as sensors.

show abstract

Section: Fbarmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Comparison of FBAR and QCM-D sensitivity dependence on adlayer thickness and viscosity

Nirschl

Schreiter

Vörös

2011

Sensors and Actuators A: Physical

View full text Add to dashboard Cite

show abstract

“…Thickness-twist modes of crystal plates are often used as the operating modes for resonators, filters and acoustic wave sensors [1][2][3][4][5] made from quartz [1][2][3][4] and polarized ceramics [5]. Recently, thin AlN and ZnO films are of growing interest because of the development of thin-film resonators [6,7]. They are crystals of 6 mm symmetry.…”

Section: Introductionmentioning

confidence: 99%

Propagation of thickness-twist waves in a multi-sectioned piezoelectric plate of 6 mm crystals

Yang

Chen

et al. 2007

Arch Appl Mech

View full text Add to dashboard Cite

We study thickness-twist vibrations and waves in an unbounded, multi-sectioned piezoelectric plate of crystals with 6 mm symmetry or polarized ceramics. An exact solution from the three-dimensional equations of piezoelectricity is obtained. Basic vibration and wave propagation characteristics are calculated based on the solution. The results are useful in the understanding and design of plate resonators, filters and acoustic wave sensors of ZnO, AlN and polarized ceramics.

show abstract

“…In addition to quartz plates which have been used for a long time, recently AlN and ZnO plates are of growing interest [11,12]. They are crystals of 6 mm symmetry.…”

mentioning

confidence: 99%

A new mass sensor based on thickness-twist edge modes in a piezoelectric plate

Yang

Soh

2007

Europhys. Lett.

View full text Add to dashboard Cite

show abstract

Solidly mounted ZnO shear mode film bulk acoustic resonators for sensing applications in liquids

Cited by 93 publications

References 17 publications

Comparison of FBAR and QCM-D sensitivity dependence on adlayer thickness and viscosity

Comparison of FBAR and QCM-D sensitivity dependence on adlayer thickness and viscosity

Propagation of thickness-twist waves in a multi-sectioned piezoelectric plate of 6 mm crystals

A new mass sensor based on thickness-twist edge modes in a piezoelectric plate

Contact Info

Product

Resources

About