Mechanical components are exposed
to a rigorous environment in
a number of applications including engineering, aerospace, and automobiles.
Thus, their service lifetime and reliability are always on the verge
of risk. Protective coatings with high hardness are required to enhance
their service lifetime and minimize the replacement cost and waste
burden. Hydrogenated amorphous carbon including nitrogen-incorporated
films, that are commonly deposited by plasma-enhanced chemical vapor
deposition, are widely used for commercial protective coating applications.
However, their mechanical hardness still falls into the moderate hard
regime. This needs to be substantially enhanced for advanced applications.
Here, we report the synthesis of very hard nanostructured hydrogenated
carbon–nitrogen hybrid (n-C:H:N) films. The optimized n-C:H:N
film displays a hardness of about 36 GPa, elastic modulus of 360 GPa,
and reasonably good elastic recovery (ER) of 62.7%. The mechanical
properties of n-C:H:N films are further tailored when nitrogen pressure
is tuned during the growth. The realized remarkably improved mechanical
properties are correlated with the films’ structural properties
and experimental growth conditions. We also conducted density functional
theory calculations that show the trend for the elastic modulus of
the amorphous carbon films with varying nitrogen concentrations matches
well with experimentally measured values. Finally, we probed load-dependent
mechanical properties of n-C:H:N films and found an anomalous behavior;
some of the mechanical parameters, for instance, ER, reveal an irregular
trend with indentation load, which we explain in the framework of
the film–substrate composite concept. Overall, this work uncovers
many unknown and exciting mechanical phenomena that could pave the
way for new technological developments.