2018
DOI: 10.1088/1361-6463/aaac1b
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Solution processable high quality ZrO2dielectric films for low operation voltage and flexible organic thin film transistor applications

Abstract: Low temperature fabrication of high quality dielectric films for high performance flexible electronics is still a big challenge. In this work, we realized low temperature fabrication of high quality amorphous ZrO2 dielectric films via a low-cost solution process. The microstructure and electrical properties, as well as the electronic structures of solution processed ZrO2 films have been investigated systematically. The ZrO2 films with 160 °C annealed showed a low leakage current (3.6  ×  10−5 A cm−2 at  −3 V) … Show more

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Cited by 25 publications
(9 citation statements)
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“…Ultrathin organic polymer films or self‐assembled monolayers are usually used as interfacial modification layers . In the case of ultrathin polymer films prepared by solution spin coating, these must be perfectly deposited on the surface‐activated gate dielectric layer . In addition, hydroxylation of the deposited dielectric surface is also essential for self‐assembly of the monolayer .…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…Ultrathin organic polymer films or self‐assembled monolayers are usually used as interfacial modification layers . In the case of ultrathin polymer films prepared by solution spin coating, these must be perfectly deposited on the surface‐activated gate dielectric layer . In addition, hydroxylation of the deposited dielectric surface is also essential for self‐assembly of the monolayer .…”
Section: Resultsmentioning
confidence: 99%
“…For determination of surface reactive groups and hydroxyl groups, we utilized XPS analysis . From the XPS data (see Figure S2, Supporting Information), it was determined that the proportion of MOH binding states is only ≈12.5% for the thermal‐La 2 O 3 films, which is significantly lower than the value of ≈74.7% for DUV‐La 2 O 3 films.…”
Section: Resultsmentioning
confidence: 99%
“…In addition, there are reports on the application of ZrO 2 doped polymer modified thin films in the dielectric gate of metal oxide thin film transistor (MOTFT) [69,70] (Figure 7b) and organic thin film transistor (OTFT) [67,71,72] (Figure 7c). Among them, many of these hybrid materials can be obtained by the sol-gel method, which is a solution, low-temperature process compatible with deposition on large-area substrates.…”
Section: Coupling With Organic Materialsmentioning
confidence: 99%
“…Solution-processable electronic materials have attracted considerable attention in a range of optoelectronic fields, such as displays [ 1 , 2 , 3 ], thin-film transistors [ 4 , 5 , 6 ], and sensors [ 7 , 8 , 9 ]. This is because their processing advantages (e.g., roll-to-roll [ 10 , 11 , 12 ] and several printing processes [ 13 , 14 , 15 , 16 ]) make it possible to commercialize low-cost and large-area optoelectronic devices.…”
Section: Introductionmentioning
confidence: 99%