“…18 Unlike in the solvothermal conversion of metal oxide layers to MOFs, 19 metal ions cannot be removed from the surface during MOF-CVD, leading to pinhole-free and conformal films. Vapor-phase growth of MOFs is a rapidly expanding area, 20 as illustrated by reports on the deposition of ZIF-67, 21 CuBDC, 22 CuCDC, 22 HKUST-1, 23 and a Zn-carboxylate-pyrazolate MOF-5 isotype structure. 24 Furthermore, related approaches have been developed such as CVD of amorphous precursors followed by postdeposition crystallization to form MOF-5, 25 IRMOF-8, 26 UiO-66 27 and UiO-66-NH2 28 , and the deposition of crystalline coordination compounds (e.g., CaBDC 29 , different CuBDC polymorphs 22,30 ).…”