Optical microcavities confine light spatially and temporally and find application in a wide range of fundamental and applied studies. In many areas, the microcavity figure of merit is not only determined by photon lifetime (or the equivalent quality-factor, Q), but also by simultaneous achievement of small mode volume ͑V͒. Here we demonstrate ultra-high Q-factor small mode volume toroid microcavities on-a-chip, which exhibit a Q/V factor of more than 10 6 ͑ / n͒ −3 . These values are the highest reported to date for any chip-based microcavity. A corresponding Purcell factor in excess of 200 000 and a cavity finesse of Ͼ2.8ϫ 10 6 is achieved, demonstrating that toroid microcavities are promising candidates for studies of the Purcell effect, cavity QED or biochemical Microcavities can be characterized by two figures of merits: the temporal confinement is described by the quality factor of the mode ͑Q͒, and the spatial confinement is characterized by the mode volume ͑V͒.1 Of all optical microcavities, whispering-gallery-type microsphere resonators have obtained the highest Q factor to date (nearly 9 billion 2 ). While Q-factor figures prominently in many applications, minimizing mode volume is also important in a variety of fundamental and applied studies such as cavity quantum electrodynamics (cQED) studies, photonics and biochemical sensing. In particular, a high Q/V ratio is desirable in applications such as lasers, add-drop filters and biochemical sensors, which rely upon a large finesse. Cavities can also be used to enhance the spontaneous emission rate, a concept which is used in "single-photon on-demand" sources, 3,4 where the figure of merit is the Purcell factor, given byWafer-based cavities such as photonic crystals, 6,7 microposts, 3 or microdisks 8 typically have much smaller mode volume than microspheres, and allow wafer-scale integration and control.9 However, the Q factor of these cavities has remained significantly lower than for silica microspheres. However, recently, ultra-high-Q performance on a chip has been demonstrated using a toroid-microcavity.
10These cavities allow integration and control previously not accessible in the ultra-high-Q regime. Here we demonstrate that toroid microcavities not only allow one to obtain ultrahigh-Q, but also to achieve small mode volumes, reaching a previously inaccessible range of Q/V ratio of more than 10 6 ͑ / n͒ −3 . By variations of the principal and minor toroid diameter, the Q/V value was adjusted and the highest achieved value was Q / V m Ϸ 2.5ϫ 10 6 ͑ / n͒ −3 (for a toroid microcavity with = 1550 nm, V m Ϸ 180 m 3 , and Q Ϸ 4 ϫ 10 8 ). This result is more than one order of magnitude larger than the highest value reported so far, using photonic crystal defect cavities. 6 Further optimization of the toroid microcavity can result in yet higher values.The use of silica microtoroids allows the preservation of ultra-high-Q factors while the additional transverse spatial confinement of the optical mode over spherical cavities results in a smaller modal volum...