Some characteristics of sputtered polytetrafluoroethylene films

Pratt, I. H.; Lausman, T.C.

doi:10.1016/0040-6090(72)90281-7

Cited by 49 publications

(13 citation statements)

References 2 publications

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“…Bulk PTFE with an F b of 110 V/μm [40] exhibits only about half the F b values of PP-OFCB films. The lower dielectric strengths observed for PP-OFCB films are attributed to the lessdensely crosslinked structures.…”

Section: Breakdown Strength Of the Pecvd Filmsmentioning

confidence: 95%

The relationship between chemical structure and dielectric properties of plasma-enhanced chemical vapor deposited polymer thin films

et al. 2007

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Section: Breakdown Strength Of the Pecvd Filmsmentioning

confidence: 95%

The relationship between chemical structure and dielectric properties of plasma-enhanced chemical vapor deposited polymer thin films

et al. 2007

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“…Sputtered fluorocarbon thin films have been extensively studied by many groups. The Biederman group greatly contributed to developing RF-sputtered plasma polymer thin films 2 – 9 , 12 , 16 , 18 , 25 , 30 , 49 , 53 . They reported notable results on the sputtering of various types of polymer targets under various gas conditions to form super-hydrophobic, nanocomposite thin films.…”

Section: Introductionmentioning

confidence: 99%

Fluorocarbon Thin Films Fabricated using Carbon Nanotube/Polytetrafluoroethylene Composite Polymer Targets via Mid-Frequency Sputtering

Kim

Choi

et al. 2017

Sci Rep

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Carbon nanotube/polytetrafluoroethylene composite polymer targets are proposed for use in the fabrication of fluorocarbon thin films using the mid-frequency sputtering process. Fluorocarbon thin films deposited using carbon nanotube/polytetrafluoroethylene composite targets exhibit an amorphous phase with a smooth surface and show a high water contact angle, optical transmittance, and surface hardness. X-ray photoelectron spectroscopy and Fourier transform infrared spectroscopy studies reveal that as the carbon nanotube concentration increased in the composite target, a carbon cross-linked structure was formed, which enhanced the film hardness and the modulus of the fluorocarbon thin film. Large-area fluorocarbon thin films with a substrate width of 700 mm were successfully fabricated by a pilot-scale roll-to-roll sputtering system using a carbon nanotube/polytetrafluoroethylene composite target.

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“…The attempts to prepare fluorocarbon polymer‐like films can be dated back to the end of the sixties and continued until the beginning of eighties 1–9. The targeted applications were low friction coatings, excellent dielectric films and optical coatings 1, 2, 6.…”

Section: Introductionmentioning

confidence: 99%

Super‐Hydrophobic Coatings Prepared by RF Magnetron Sputtering of PTFE

Drábik

Polonskyi

Kylián

et al. 2010

Plasma Processes & Polymers

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Fluorocarbon plasma polymer films were prepared by RF magnetron sputtering in Argon from a balanced magnetron equipped with polytetrafluoroethylene (PTFE) target. Depending on the deposition conditions, primarily on the working gas pressure and distance between the target and the substrate, plasma polymer ﬁlms were obtained with distinctly different chemical composition and/or morphology, as measured by means of XPS, FTIR and AFM. These films possessed static contact angle of water values ranging from 112° to ≈170° i.e. their behaviour ranged from hydrophobic to superhydrophobic ones.

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Some characteristics of sputtered polytetrafluoroethylene films

Cited by 49 publications

References 2 publications

The relationship between chemical structure and dielectric properties of plasma-enhanced chemical vapor deposited polymer thin films

The relationship between chemical structure and dielectric properties of plasma-enhanced chemical vapor deposited polymer thin films

Fluorocarbon Thin Films Fabricated using Carbon Nanotube/Polytetrafluoroethylene Composite Polymer Targets via Mid-Frequency Sputtering

Super‐Hydrophobic Coatings Prepared by RF Magnetron Sputtering of PTFE

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