Some emission properties of the AuSiSb liquid metal ion source

Abstract

A liquid metal ion source producing Si and Sb ions on the basis of an AuSiSb alloy has been investigated. Intensive lines o f Sizt and Sbzt ions, which are particularly suitable for use in focused Ion beam systems, have been identified in the ion beam mass spectrum. The energy distributions of the main peaks in the mass spectrum, Sit, Sizt, Sbt, SbZt, Aut and A S t , have been investigated at temperatures of 500 "C, 600 "C and 700 'C. The full width at half maximum of the energy distribution is evaluated to be between 10 and 16 eV.