1999
DOI: 10.1351/pac199971101809
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Some fundamental aspects of elementary gas-surface interactions

Abstract: Some of the most recent results obtained in theoretical studies on the dynamics of elementary gas±surface processes are presented and discussed. In particular, we give examples of the importance of electronic structure calculations, classical and semiclassical dynamics simulations for understanding the fundamental features of surface reactions relating to plasma processing and plasma-wall interactions.

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Cited by 5 publications
(8 citation statements)
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“…This occurs at surface locations where the atom can come close enough to a surface atom (or group of atoms) to undergo a strong "electron-exchange" interaction, at a distance comparable with the distance between surface atoms. This is known as atom chemisorption and the active surface sites are denoted as chemisorption sites [1,5,[14][15][16][17][18][19][21][22][23]. On clean metallic surfaces an atom can chemisorb almost anywhere, since free electrons from the metal are accessible.…”
Section: Surface Kinetics Model For Recombination At Pressures Above mentioning
confidence: 99%
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“…This occurs at surface locations where the atom can come close enough to a surface atom (or group of atoms) to undergo a strong "electron-exchange" interaction, at a distance comparable with the distance between surface atoms. This is known as atom chemisorption and the active surface sites are denoted as chemisorption sites [1,5,[14][15][16][17][18][19][21][22][23]. On clean metallic surfaces an atom can chemisorb almost anywhere, since free electrons from the metal are accessible.…”
Section: Surface Kinetics Model For Recombination At Pressures Above mentioning
confidence: 99%
“…The distributions are shown in the insert. The dashed lines correspond to the simple Arrhenius expression (16) with E act 0.13 eV (1500 K), A=0.09 for T w = +5C and A=0.044 for T w = +50C.…”
Section: Model Parametermentioning
confidence: 99%
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“…At low pressure the main source of the uncertainties is surface, namely, absence of exact knowledge about surface processes with O atoms. Despite that the mechanisms of O( 3 P) surface recombination are known and have been studied in whole [1][2][3][4][5][6][7][8][9][10], application of the mechanisms in each specific case requires exact knowledge of many parameters, such as, for example, desorption and activation energies, densities of active surface sites, steric reaction factors, etc [5][6][7][8][9][10][11][12][13][14]. Moreover, these surface characteristics are not constant, but have complex distributions since surface sites are not absolutely the same [3,15].…”
Section: Introductionmentioning
confidence: 99%
“…The energy released in the reaction can be shared among the degrees of freedom of the newly formed molecules (rotations, vibrations, translation and, possibly, electronic) and the degrees of freedom of the substrate (phonons and, possibly, electrons). Different systems of interest in aerospace applications have been investigated using Molecular Dynamics (MD) studies by means of classical or quasi-classical trajectories [72,73,74] and semiclassical methods [75,76,77,78,79,80,81,82], by deriving the probability of recombination and the ro-vibrational nascent distributions.…”
Section: Introductionmentioning
confidence: 99%