Some physical properties of undoped amorphous silicon prepared by a new CVD process using iodosilanes

TamizhMani, GovindaSamy; Cocivera, Michael; Oakley, Richard T.; Belluz, Paul Del Bel

doi:10.1021/cm00010a029

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Silicon Compounds, Silanes

Arkles

2000

Kirk-Othmer Encyclopedia of Chemical Technology

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Silanes are silicon compounds that can be divided into five important industrial groups: those containing Si–H (hydride functional silanes), Si–X (halosilanes), Si–C (organosilanes), Si–OSi (siloxanes), and Si–OR (silicon esters). Inorganic and organic hydride and halogen functional silanes are discussed. Physical and chemical properties are covered as are their manufacture and application in such areas as feedstocks for other classes of silicon compounds, fumed silica, and semiconductor silicon and silicones. Economic aspects of the production and utilization of silanes include estimates of semiconductor‐grade silicon production.

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Silicon Compounds, Silanes

Arkles

2000

Kirk-Othmer Encyclopedia of Chemical Technology

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ChemInform Abstract: Some Physical Properties of Undoped Amorphous Silicon Prepared by a New Chemical Vapor Deposition Process Using Iodosilanes.

et al. 1990

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028ChemInform Abstract H2SiI2 (I) and HSiI3 (II) are prepared by reaction of H2SiPh2 and HSiPh3, resp., with HI in the presence of a AlI3 catalyst. It is demonstrated that the thermal decomposition of (I) and (II) (hetero-and homo-CVD at 500-600 rc C and 350-400 rc C, resp.) can be used to prepare uniform amorphous Si films with up to 4 µm thickness on glass or indium/tin oxide (ITO) coated glass substrates. The films exhibit high purity and contain only very small amounts of I, O, and H. A mechanism for the thermal decomposition process is proposed.

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Synthesis of monolithic 3D ordered macroporous carbon/nano-silicon composites by diiodosilane decomposition

Wang

Ergang

et al. 2008

Carbon

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Some physical properties of undoped amorphous silicon prepared by a new CVD process using iodosilanes

Cited by 4 publications

References 0 publications

Silicon Compounds, Silanes

Silicon Compounds, Silanes

ChemInform Abstract: Some Physical Properties of Undoped Amorphous Silicon Prepared by a New Chemical Vapor Deposition Process Using Iodosilanes.

Synthesis of monolithic 3D ordered macroporous carbon/nano-silicon composites by diiodosilane decomposition

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