Sources, Optics, and Laser Microfabrication Systems for Direct Writing and Projection Lithography

Modulo-2it phase elements calculated by relatively simple ray-tracing methods turned out to be suitable tools for laser beam profile homogenization under certain preconditions.As an example, we present results ofthe transformation of a Gaussian TEM00-input beam with = 1O.6?.tm into a boxshaped intensity profile ("homogeneously illuminated rectangle") which has to be generated in the so called focal plane at a given distance from the element. The manufacturing ofthe investigated elements was realized by electron-beam lithography in combination with reactive ion etching. For computer modeling of the behavior of these elements a FFT-algorithm was used, working on the basis ofparaxial approximation ofthe Kirchhoff-mtegral.The quality of achieved beam shaping depends of several parameters covering effects which are design-dependent, input-beam dependent, set-up dependent, or technology dependent. In an earlier paper we investigated the influence of varying beam waist diameter and beam waist position for a given element as well as of varying distance of the plane under investigation from the designed focal plane. In the present paper the interest is focused onto the influence of varying size of the element's clear aperture and of technologically caused deviations of realized step heights from the design values for the multilevel binary profile. Evaluation criteria were the lateral intensity distribution as well as the quantities diffraction efficiency and mean square amplitude deviation.

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The Symbiosis of Light and Matter: Laser-Engineered Materials for Photo-Functionality

Livingston¹,

Helvajian²

2007

MRS Bull.

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Current technology trends imply that further miniaturization and integration of systems are anticipated, and one approach to realizing the next generation of systems integration is the development of materials that are protean, or capable of taking on various properties; in essence, the materials properties can be selectively altered via laser excitation. The objective is that a common substrate material can be used for multiple functions. Laser direct-write material processing, because of its maskless patterning flexibility, is inherently suitable for producing localized changes in materials properties and thereby fabricating linked, integrated devices on a common substrate. The enabling of this new form of materials processing requires a light-activated protean material along with a scheme for the dynamic regulation of the laser energy for optimum laser processing on the scale of the laser spot size and for patterning speeds on the order of meters per second. The “protean material” concept and a high-fidelity laser amplitude-modulation scheme are the focus of this article.

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Sources, Optics, and Laser Microfabrication Systems for Direct Writing and Projection Lithography

Cited by 3 publications

References 126 publications

Design and performance of an excimer-laser based optical system for high precision microstructuring

Design and performance of an excimer-laser based optical system for high precision microstructuring

<title>Ray-tracing-based phase elements as tools for CO2 laser beam profile homogenization: influence of different parameters and ranges of tolerances</title>

The Symbiosis of Light and Matter: Laser-Engineered Materials for Photo-Functionality

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