Metasurfaces, a two-dimensional (2D) form of metamaterials
constituted
by planar meta-atoms, exhibit exotic abilities to tailor electromagnetic
(EM) waves freely. Over the past decade, tremendous efforts have been
made to develop various active materials and incorporate them into
functional devices for practical applications, pushing the research
of tunable metasurfaces to the forefront of nanophotonics. Those
active materials include phase change materials (PCMs), semiconductors,
transparent conducting oxides (TCOs), ferroelectrics, liquid crystals
(LCs), atomically thin material, etc., and enable
intriguing performances such as fast switching speed, large modulation
depth, ultracompactness, and significant contrast of optical properties
under external stimuli. Integration of such materials offers substantial
tunability to the conventional passive nanophotonic platforms. Tunable
metasurfaces with multifunctionalities triggered by various external
stimuli bring in rich degrees of freedom in terms of material choices
and device designs to dynamically manipulate and control EM waves
on demand. This field has recently flourished with the burgeoning
development of physics and design methodologies, particularly those
assisted by the emerging machine learning (ML) algorithms. This review
outlines recent advances in tunable metasurfaces in terms of the active
materials and tuning mechanisms, design methodologies, and practical
applications. We conclude this review paper by providing future perspectives
in this vibrant and fast-growing research field.