Chemical Vapor Deposition for Nanotechnology 2019
DOI: 10.5772/intechopen.82439
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Spatial Atomic Layer Deposition

Abstract: In conventional atomic layer deposition (ALD), precursors are exposed sequentially to a substrate through short pulses while kept physically separated by intermediate purge steps. Spatial ALD (SALD) is a variation of ALD in which precursors are continuously supplied in different locations and kept apart by an inert gas region or zone. Film growth is achieved by exposing the substrate to the locations containing the different precursors. Because the purge step is eliminated, the process becomes faster, being in… Show more

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Cited by 28 publications
(29 citation statements)
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“…This approach is known as spatial PEALD (PE-s-ALD) and allows us to achieve higher throughput values. 12 , 13 In addition, PE-s-ALD can be performed at atmospheric pressure, which can be desired for applications where cost and volume are highly important, such as (flexible) displays, batteries, and photovoltaic devices. 14 20 …”
Section: Introductionmentioning
confidence: 99%
“…This approach is known as spatial PEALD (PE-s-ALD) and allows us to achieve higher throughput values. 12 , 13 In addition, PE-s-ALD can be performed at atmospheric pressure, which can be desired for applications where cost and volume are highly important, such as (flexible) displays, batteries, and photovoltaic devices. 14 20 …”
Section: Introductionmentioning
confidence: 99%
“…[26] The quality of thin films deposited by SALD has been shown through their intense application to photovoltaics. [27,28] While AP-SALD can be implemented in many different ways, [20,29] the close-proximity approach initially developed by Levi et al is particularly interesting (Figure 1a). [30] It is based on a manifold injection head (Figure 1b) in which the different precursors and inert gas are distributed along parallel slots over a moving substrate.…”
mentioning
confidence: 99%
“…However, the extremely low GPC values of conventional ALD are not suitable for mass-production. In this regard, it is worth attempting to apply the recently proposed spatial ALD (SALD), which allows a much faster deposition rate, to complex nanostructures [101][102][103]. The remaining technical issue is to ensure the deposition of inorganic thin films at low temperatures.…”
Section: Discussionmentioning
confidence: 99%