Spatial Variations of Plasma Parameters in a Hollow Cathode Discharge

Andreev, Sergey; Bernatskiy, A. V.; Очкин, В. Н.

doi:10.1007/s11090-020-10137-4

Cited by 14 publications

(10 citation statements)

References 28 publications

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“…EEDF measurements were carried out using an original system with a large dynamic range [14,16]. The system works on the principle of a single Langmuir probe.…”

Section: Methodsmentioning

confidence: 99%

“…It should be noted that the mentioned above experimental and theoretical studies were carried out mainly for the conditions of a cylindrical glow discharge in neon. In recent works [6,14], the EEDF was measured in a discharge plasma with a hollow cathode, in which the distance between the cathode and anode was 3 cm. The measured functions turned out to be strongly depleted of low-energy electrons.…”

Section: Introductionmentioning

confidence: 99%

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Measurements and interpretation of EEDF in a discharge with a hollow cathode in helium: effect of the measuring probe and the anode on the form of the distribution function

Andreev¹,

Bernatskiy²,

Dyatko³

et al. 2022

Plasma Sources Sci. Technol.

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Experimental and theoretical studies of the electron energy distribution function in hollow cathode discharge plasma have been carried out. The discharge was ignited in helium at a pressure of 0.75 Torr, and the distance between the rectangular hollow cathode and anode was 3 cm. The measurements were performed using the probe method at various distances from the anode. The obtained distribution functions turned out to be strongly depleted in low-energy electrons. As applied to the experimental conditions, the role of two effects that can lead to such depletion was analyzed: instrumental distortions of the distribution function due to the electron sink on the probe and the absorption of electrons by the anode. According to the calculations, under the considered conditions, the main contribution to the depletion of the measured distribution functions by the slow electrons comes from the second effect.

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“…EEDF measurements were carried out using an original system with a large dynamic range [14,16]. The system works on the principle of a single Langmuir probe.…”

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Measurements and interpretation of EEDF in a discharge with a hollow cathode in helium: effect of the measuring probe and the anode on the form of the distribution function

Andreev¹,

Bernatskiy²,

Dyatko³

et al. 2022

Plasma Sources Sci. Technol.

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“…A new approach was used [11,12,15] to the formation of the IVC of the probe circuit when voltage is applied to the probe in the form of a combination of periodic and noise signals. This type of signal makes it possible to reduce the errors in determining the EEDF significantly in comparison with the use of only traditional periodic (sawtooth, sinusoidal, etc) signal forms.…”

Section: Methodsmentioning

confidence: 99%

“…The IVCs obtained during the experiment were processed by the Savitzky-Golay algorithm [28] to determine the EEDF [11,12,15]. During measurements, an array of IVCs was recorded, usually consisting of 256 dependences.…”

Section: Methodsmentioning

confidence: 99%

“…In this paper, we compared the methods available in the literature for taking into account the sink (their number has been expanded in comparison with the last review [2]). Experimental EEDFs obtained by modern methods [11,12] in a large dynamic range were analyzed. The EEDFs used for the analysis were obtained by solving the local Boltzmann equation for the experimental conditions.…”

Section: Introductionmentioning

confidence: 99%

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Electron sink on the Langmuir probe in plasma, its influence on measurements and methods to account for it

Andreev¹,

Bernatskiy²,

Dyatko³

et al. 2021

Plasma Sources Sci. Technol.

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The influence of the electron sink effect on the probe on the results of measurements of the electron energy distribution functions (EEDFs), plasma potential, and electron concentration was studied. The studies were carried out for helium in a discharge with a hollow cathode at a gas pressure of 1 Torr for cathode-anode distances of 1 cm and 3 cm; measurements were carried out at several distances from the cathode. The distribution functions were obtained by processing the probe volt-ampere characteristics using the standard Druyvesteyn method. The form of the measured EEDFs changed with distance from the cathode. According to test calculations performed using the Monte Carlo method, this was due to the nonlocal nature of the EEDF formation under the considered conditions. Calculations also showed that the nonlocality effect manifests itself mainly in the region of the high-energy part of the EEDF, while in the low-energy region the form of the EEDF is close to local one. The latter fact was used to correct the measured EEDFs with allowance for the effect of electron sinking to the probe. In standard probe measurements, the sink (flux, flow) of electrons to the probe leads to underestimated values of the EEDFs in the region of low electron energies. The paper analyzes various known methods (formulas) for calculating the amount of sink in relation to the experimental conditions under consideration. The correction of the measured EEDFs was carried out taking into account the indicated effect. The errors in determining the macroscopic parameters of the plasma and the rates of elementary processes using the EEDFs obtained by processing the probe characteristics without taking into account the sink effect were analyzed.

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Influence of the surface state on the dynamics of the bulk density of O2 molecules in mixtures with inert and molecular particles in gas and glow discharge

2022

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Spatial Variations of Plasma Parameters in a Hollow Cathode Discharge

Cited by 14 publications

References 28 publications

Measurements and interpretation of EEDF in a discharge with a hollow cathode in helium: effect of the measuring probe and the anode on the form of the distribution function

Measurements and interpretation of EEDF in a discharge with a hollow cathode in helium: effect of the measuring probe and the anode on the form of the distribution function

Electron sink on the Langmuir probe in plasma, its influence on measurements and methods to account for it

Influence of the surface state on the dynamics of the bulk density of O2 molecules in mixtures with inert and molecular particles in gas and glow discharge

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