Nanocrystalline diamond films have generated significant interest in application areas as diverse as heat spreading, micro-electro-mechanical systems (MEMS), electrochemistry, tribology and field emission to name a few. 1 A large proportion of these applications require some level of electrical conductivity, usually pseudo-metallic conductivity. Due to the small size of the diamond crystals, free carrier mobilities are rather low (around 1 cm 2 V À1 s À1 ) and, thus, nanocrystalline diamond is generally inappropriate for active electronic devices. 2 However, diamond electrodes are readily fabricated for electrochemistry and MEMS. 3,4 The conductivity mechanisms of nanocrystalline or nanodiamond films fall generally into two categories: conventional doping with substitutional boron (p-type) and the generation of an enhanced density of states within the bandgap due to sp 2 bonding (n-type). 5,6 These differences are strongly related to the micro/nanostructure of the diamond films and will be discussed in detail in this chapter.