Spatially Localized Formation of InAs Quantum Dots on Shallow Patterns Regardless of Crystallographic Directions

Lee, Jihoon; Wang, Zhiming M.; Black, William T.; Kunets, Vasyl P.; Mazur, Yuiry Ivanouych; Salamo, Gregory J.

doi:10.1002/adfm.200700066

Cited by 19 publications

(19 citation statements)

References 37 publications

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“…In this thermodynamic equilibrium system, in order to keep the energy of the whole system in the lowest state, bigger droplets tend to absorb nearby adatoms to lower the surface energy, and thus, the size can grow larger and the density can be reduced until reaching the equilibrium. Thus, this type of size and density evolution was witnessed in Ga and In metal droplets [35,37,38] and nanostructures [39-41] on various semiconductor substrates.…”

Section: Resultsmentioning

confidence: 99%

From the nucleation of wiggling Au nanostructures to the dome-shaped Au droplets on GaAs (111)A, (110), (100), and (111)B

Sui

Kim

et al. 2014

Nanoscale Res Lett

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In this paper, the systematic evolution process of self-assembled Au droplets is successfully demonstrated on GaAs (111)A, (110), (100), and (111)B. On various GaAs substrates, self-assembled Au clusters begin to nucleate at around 300°C, and then, they develop into wiggly Au nanostructures at 350°C. Between 400°C and 550°C, the self-assembled dome-shaped Au droplets with fine uniformity are fabricated with various sizes and densities based on the Volmer-Weber growth mode. Depending on the annealing temperature, the size including the average height and lateral diameter and the density of Au droplets show the opposite trend of increased size with correspondingly decreased density as a function of the annealing temperature due to the difference in the diffusion length of adatoms at varied activation energy. Under an identical growth condition, depending on the surface index, the size and density of Au droplets show a clear distinction, observed throughout the temperature range. The results are systematically analyzed and discussed in terms of atomic force microscopy (AFM) images, cross-sectional line profiles, and Fourier filter transform (FFT) power spectra as well as the summary plots of the size and density.

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Section: Resultsmentioning

confidence: 99%

From the nucleation of wiggling Au nanostructures to the dome-shaped Au droplets on GaAs (111)A, (110), (100), and (111)B

Sui

Kim

et al. 2014

Nanoscale Res Lett

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“…In short, as the annealing temperature was increased, the average density gradually decreased and the decrease in density was compensated by expansion of dimension, i.e., AH and LD. This trend, increased droplet dimensions associated with decreased density along with increased fabrication temperature, is a conventional behavior of metal droplets [30-32] and even of quantum structures and nanostructures [33-35] on various semiconductor surfaces. With increased annealing temperature, the surface diffusion as well as the diffusion length can be further enhanced, which consequently can result in increased dimension of metal droplets.…”

Section: Resultsmentioning

confidence: 99%

Annealing temperature effect on self-assembled Au droplets on Si (111)

Sui

Kim

et al. 2013

Nanoscale Res Lett

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We investigate the effect of annealing temperature on self-assembled Au droplets on Si (111). The annealing temperature is systematically varied while fixing other growth parameters such as deposition amount and annealing duration clearly to observe the annealing temperature effect. Self-assembled Au droplets are fabricated by annealing from 50°C to 850°C with 2-nm Au deposition for 30 s. With increased annealing temperatures, Au droplets show gradually increased height and diameter while the density of droplets progressively decreases. Self-assembled Au droplets with fine uniformity can be fabricated between 550°C and 800°C. While Au droplets become much larger with increased deposition amount, the extended annealing duration only mildly affects droplet size and density. The results are systematically analyzed with cross-sectional line profiles, Fourier filter transform power spectra, height histogram, surface area ratio, and size and density plots. This study can provide an aid point for the fabrication of nanowires on Si (111).

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“…In molecular beam epitaxy (MBE) processes, this can be achieved by defining the nucleation sites for impinging atoms using patterning the surface. Patterning is usually accomplished by lithographic techniques, such e-beam lithography [7][8][9][10][11], nanoimprint lithography [12], interference lithography, photolithography [13], or atomic force microscopy (AFM) lithography [14].…”

Section: Introductionmentioning

confidence: 99%

The Role of Groove Periodicity in the Formation of Site-Controlled Quantum Dot Chains

Schramm¹,

Hakkarainen²,

Tommila³

et al. 2016

Nano Online

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Structural and optical properties of InAs quantum dot (QD) chains formed in etched GaAs grooves having different periods from 200 to 2000 nm in [010] orientation are reported. The site-controlled QDs were fabricated by molecular beam epitaxy on soft UV-nanoimprint lithography-patterned GaAs(001) surfaces. Increasing the groove periods decreases the overall QD density but increases the QD size and the linear density along the groove direction. The effect of the increased QD size with larger periods is reflected in ensemble photoluminescence measurements as redshift of the QD emission. Furthermore, we demonstrate the photoluminescence emission from single QD chains.

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Spatially Localized Formation of InAs Quantum Dots on Shallow Patterns Regardless of Crystallographic Directions

Cited by 19 publications

References 37 publications

From the nucleation of wiggling Au nanostructures to the dome-shaped Au droplets on GaAs (111)A, (110), (100), and (111)B

From the nucleation of wiggling Au nanostructures to the dome-shaped Au droplets on GaAs (111)A, (110), (100), and (111)B

Annealing temperature effect on self-assembled Au droplets on Si (111)

The Role of Groove Periodicity in the Formation of Site-Controlled Quantum Dot Chains

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