Annealing experiments in nitrogen, oxygen, and reducing atmospheres are made on mechanically damaged ZnO ceramics. The annealing effect is monitored by means of the sample CL emission. Deformation induced damage appears to be unstable at temperatures above 1040 K indepently of the annealing atmosphere. The role played by reducing and oxidizing treatments on the CL changes in damaged areas is discussed on the basis of different charge states of copper.