Spatially-resolved spectroscopic investigation of the inhomogeneous magnetic field effects on a low-pressure capacitively-coupled nitrogen plasma

Han, Jonggu; Kim, Jihoon; Park, Woojin; Park, Sang Jun; Baek, Song Yi; Yoo, Byeongsun; Choi, Chulhwan; Moon, Se Youn

doi:10.1016/j.cap.2024.09.010

Current Applied Physics

2024

DOI: 10.1016/j.cap.2024.09.010

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Spatially-resolved spectroscopic investigation of the inhomogeneous magnetic field effects on a low-pressure capacitively-coupled nitrogen plasma

Jonggu Han,

Jihoon Kim,

Woojin Park

et al.

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2024

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Impact of Inhomogeneous Magnetic Fields on Polymer Deposition in Low‐Pressure Capacitively Coupled Ar/C₄F₈ Plasma

Kim,

Han,

Park

et al. 2024

Plasma Processes & Polymers

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Magnetized plasmas are widely utilized in semiconductor fabrication due to their high processing efficiency. However, comprehensive studies involved in thin film formation—particularly the influence of magnetic fields on elemental reactions—remain limited. Additionally, using CxFy gases for plasma processing presents challenges in understanding the behavior of magnetized plasma. Thus, the effects of inhomogeneous magnetic fields on polymer deposition in low‐pressure, magnetized Ar/C4F8 plasma were investigated through spatially resolved diagnostics. Introducing inhomogeneous magnetic fields led to notable localized changes, increasing ion, CF2, and F densities by factors of 2.29, 1.44, and 1.71 times, respectively. These variations resulted in thinner films with lower carbon‐to‐fluorine ratios. The findings highlight the potential of asymmetric plasma parameter control to modulate film properties locally.

show abstract

Impact of Inhomogeneous Magnetic Fields on Polymer Deposition in Low‐Pressure Capacitively Coupled Ar/C₄F₈ Plasma

Kim,

Han,

Park

et al. 2024

Plasma Processes & Polymers

View full text Add to dashboard Cite

show abstract

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Spatially-resolved spectroscopic investigation of the inhomogeneous magnetic field effects on a low-pressure capacitively-coupled nitrogen plasma

Cited by 1 publication

References 28 publications

Impact of Inhomogeneous Magnetic Fields on Polymer Deposition in Low‐Pressure Capacitively Coupled Ar/C₄F₈ Plasma

Impact of Inhomogeneous Magnetic Fields on Polymer Deposition in Low‐Pressure Capacitively Coupled Ar/C₄F₈ Plasma

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Spatially-resolved spectroscopic investigation of the inhomogeneous magnetic field effects on a low-pressure capacitively-coupled nitrogen plasma

Cited by 1 publication

References 28 publications

Impact of Inhomogeneous Magnetic Fields on Polymer Deposition in Low‐Pressure Capacitively Coupled Ar/C4F8 Plasma

Impact of Inhomogeneous Magnetic Fields on Polymer Deposition in Low‐Pressure Capacitively Coupled Ar/C4F8 Plasma

Contact Info

Product

Resources

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Impact of Inhomogeneous Magnetic Fields on Polymer Deposition in Low‐Pressure Capacitively Coupled Ar/C₄F₈ Plasma

Impact of Inhomogeneous Magnetic Fields on Polymer Deposition in Low‐Pressure Capacitively Coupled Ar/C₄F₈ Plasma