Abstract-This paper gives a historical survey of the development of the inhomogeneous wave theory, and its applications, in the field of ultrasonics. The references are listed predominantly chronologically and are as good as complete. Along the historical description, several scientific features of inhomogeneous waves are described. All topics of inhomogeneous wave research are taken into account, such as waves in viscoelastic solids and liquids, thermoviscous liquids and solids, and anisotropic viscoelastic materials. Also inhomogeneous waves having complex frequency are described. Furthermore, the formation of bounded beams by means of inhomogeneous waves is given and the diffraction of inhomogeneous waves on periodically corrugated surfaces. The experimental generation of inhomogeneous waves is considered as well.