Special Topics in Electron Beam X-Ray Microanalysis

Goldstein, Joseph I.; Newbury, Dale E.; Echlin, Patrick; Joy, David C.; Lyman, Charles E.; Lifshin, Eric; Sawyer, Linda C.; Michael, Joseph R.

doi:10.1007/978-1-4615-0215-9_10

Cited by 50 publications

(62 citation statements)

References 20 publications

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“…The lightest element that can be detected by EDS is lithium [10][11][12]. The lithium K X-ray from LI to K shells is not an allowed transition [13] because it fails the azimuthal quantum number (l) selection rule, with both energy levels in the transition having the same value of orbital angular momentum (l=0). This means that likelihood of X-ray emission will be very low, unless bonding interaction causes the LI electron to take on more LII/III characteristics [14].…”

Section: Resultsmentioning

confidence: 99%

Ultra-Low kV EDS – A New Approach to Improved Spatial Resolution, Surface Sensitivity, and Light Element Compositional Imaging and Analysis in the SEM

et al. 2017

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New windowless EDS detectors designed specifically to collect low-energy X-rays (< 1 keV) and to work under ultra-low kV (< 3 kV) imaging conditions with the latest FE-SEMs offer new capabilities for elemental analysis. These capabilities include enhanced spatial resolution for the study of structures down to 10 nm or less, the characterization of surface features only 1-2 nm in thickness, the analysis of highly beam-sensitive or insulating materials, and much lower detection limits for light elements such as nitrogen and boron, as well as, for the first time, the detection of lithium. This offers an important breakthrough with potential for more detailed analysis of nano-materials, battery-and bio-materials, and semiconductors in the SEM.

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Section: Resultsmentioning

confidence: 99%

Ultra-Low kV EDS – A New Approach to Improved Spatial Resolution, Surface Sensitivity, and Light Element Compositional Imaging and Analysis in the SEM

et al. 2017

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“…However, the electron range for the energy of less than 100 eV is less than 1 nm [10,11] so that the above idea is not the case.…”

Section: Deepening Of Floating Potential For Tungsten Target Plate Onmentioning

confidence: 99%

Deepening of Floating Potential for Tungsten Target Plate on the way to Nanostructure Formation

Takamura

Miyamoto

Ohno

2010

Plasma and Fusion Research

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Deepening of floating potential has been observed on the tungsten target plate immersed in high-density helium plasma with hot electron component on the way to nanostructure formation. The physical mechanism is thought to be a reduction of secondary electron emission from such a complex nano fiber-form structure on the tungsten surface. Tungsten material is very important in terms of fusion reactors, especially plasma-facing component. Helium defects are the concerns when employing the tungsten for the divertor target and/or the first wall since helium is the fusion product and would be contained by around 10% of scrape-off layer plasmas in fusion devices. Recently the nano fiber-form structures have been identified on a variety of tungsten surface irradiated by helium or helium/deuterium mixture plasmas [1,2].The surface characteristics of thus formed tungsten plate would change compared with the flat non-damaged surface, for example, the radiation emissivity [3], the sputtering yield [4], the heat conduction [5], the discharge property [6] and so on. In this report the secondary electron emission (SEE) property will be discussed in relation to the floating potential which is important with respect to the impurity releases through physical sputtering and plasma heat flux.Nano fiber-form structured tungsten surfaces have been formed in a newly developed linear plasma generator AIT-PID [3,7] as shown in Fig. 1. In this device the high density helium plasmas have been produced with a hot electron component. The plasma density exceeds 1 × 10 18 m −3 and the bulk electron temperature (T c ) is about 4 eV, while the hot electron component with the fraction of roughly 8% has a temperature (T h ) of up to 40 eV. Such a two electron temperature plasma gives a deep floating potential ensuring a high ion impact energy which is important to form nanostructured tungsten surface. The floating potential is around −40 V with respect to the vacuum chamber, and the ion incident energy to the tungsten is 45 eV considering the plasma potential of around +5 V which is unchanged during the exposure. Such a high sheath voltage can be explained by the numerical analyauthor's e-mail: takamura@aitech.ac.jp sis on the floating condition that the electron flux balances with the ion one, as shown in Fig. 2, which indicates that the value of 45 V is a little smaller than the theoretical prediction assuming a complete Maxwellian distribution for both electrons. Figure 3 shows the time evolutions of the floating potential and the tungsten surface temperature observed with a radiation thermometer with a fixed emissivity of 0.43. The drop of surface temperature comes from an increase of radiation emissivity and associated target cooling assuming a constant plasma heat flux onto the target, which was discussed in [3]. The floating potential changes rapidly from −40.0 down to −48.5 V during the period of large change in surface temperature, meaning a certain correlation with nanostructure formation.

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“…Monte-Carlo modeling [22] was performed to estimate BSE energy distribution changes for different elements concentration. Negligible BSE energy distribution changes were obtained for investigated samples so BSE detector nonlinearity can be neglected [21]. It should be noted that interaction volume in investigated samples for electrons with energy of 10 keV is about 2 μm , BSE emission volume is about 800 nm, X-ray emission depth is about 1.5 μm and X-ray intensity radial distribution has a radius about 100 nm [22], what provides sufficient spatial resolution for EDX measurements in scan regime.…”

Section: Results Of Compositional and Structural Studiesmentioning

confidence: 86%

“…The observed BSE image of the waveguides cross-section originates from material contrast (not the surface relief) that is confirmed by comparison with images, obtained by secondary electrons (SE) registration. BSE yield of the glass was calculated as an average yield of all elements with expression suggested in [21]. Monte-Carlo modeling [22] was performed to estimate BSE energy distribution changes for different elements concentration.…”

Section: Results Of Compositional and Structural Studiesmentioning

confidence: 99%

Waveguide fabrication in lithium-niobo-phosphate glasses by high repetition rate femtosecond laser: route to non-equilibrium material’s states

Dubov

Mezentsev

Manshina

et al. 2014

Opt. Mater. Express

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Abstract:We study waveguide fabrication in lithium-niobo-phosphate glass, aiming at a practical method of single-stage fabrication of nonlinear integrated-optics devices. We observed chemical transformations or material redistribution during the course of high repetition rate femtosecond laser inscription. We believe that the laser-induced ultrafast heating and cooling followed by elements diffusion on a microscopic scale opens the way toward the engineering non-equilibrium sates of matter and thus can further enhance Refractive Index (RI) contrasts by virtue of changing glass composition in and around the fs tracks. References and links1. H. Misawa and S. Juodkazis, eds., 3D Laser Microfabrication. Principles and Applications (Wiley-VCH, Weinheim, 2006). 2. R. Osellame, G. Cerullo, and R. Ramponi, Femtosecond Laser Micromachining: Photonic and Microfluidic Devices in Transparent Materials, SpringerLink : Bücher (Springer Berlin Heidelberg, 2012).

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Special Topics in Electron Beam X-Ray Microanalysis

Cited by 50 publications

References 20 publications

Ultra-Low kV EDS – A New Approach to Improved Spatial Resolution, Surface Sensitivity, and Light Element Compositional Imaging and Analysis in the SEM

Ultra-Low kV EDS – A New Approach to Improved Spatial Resolution, Surface Sensitivity, and Light Element Compositional Imaging and Analysis in the SEM

Deepening of Floating Potential for Tungsten Target Plate on the way to Nanostructure Formation

Waveguide fabrication in lithium-niobo-phosphate glasses by high repetition rate femtosecond laser: route to non-equilibrium material’s states

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