Specific contact resistance of ohmic contacts to n-type SiC membranes

Nasir, N. F. Mohd; Holland, Anthony S.; Reeves, Geoffrey K.; Leech, Patrick W.; Collins, Aaron M.; Tanner, Philip

doi:10.1557/opl.2011.1202

Cited by 2 publications

References 11 publications

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The effect of micromachining process to the biocompatibility of 3C-SiC membranes

Nasir

Gan

Shukla

et al. 2014

2014 IEEE Conference on Biomedical Engineering and Sciences (IECBES)

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3C-Silicon Carbide (SiC) has been identified as a potential biomaterial for implantable devices. The prospect of 3C-SiC membrane as the working component for BioMEMS in in-vitro blood pressure sensing could be a new challenge for biomedical engineers. Although, 3C-SiC is known to be biocompatible, but the micromachining process normally used in semiconductor industry might alter the biocompatibility of 3C-SiC. In this study, we investigate the biocompatibility of 3C-SiC which had been subjected to Potassium Hydroxide (KOH) wet etching and reactive ion etching (RIE) using tetrafluoromethane (CF 4). The Chinese Hamster Ovary (CHO) cells were directly cultured onto the prepared samples of 3C-SiC, Si and controls to investigate 3C-SiC biocompatibility. The cells were detached from the substrates and grown further in 6 well plates for another 24 hours at 37 o C with 5% CO 2 and 95% relative humidity for further testing. Cell viability percentage was determined by Trypan Blue exclusion technique which revealed the preference of the cells to grow and to proliferate on the treated SiC samples. However, the results could be inaccurate due to the nature of the testing which compromises the further ability of the cells to proliferate. Thus, a comparison was made by using Methylthiazolyldiphenyltetrazolium bromide (MTT) assay, a typical cytotoxicity assay, and also PrestoBlue TM reagent (which is the state-of-the-art assay for biocompatibility determination) to confirm the cell viability on the treated and untreated SiC. Thus, the results showed that the cells proliferated better on surface of the 3C-SiC treated with halogenated plasma which indicate the enhancement of biocompatibility of the semiconductor material due to the RIE. I. INTRODUCTION Microelectromechanical (MEMS) devices with high biocompatibility can be used for new and effective medical devices in human disease prevention and detection systems. The best condition for human physiological measurements is to avoid disruption of a patient's normal activity and this can

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The effect of micromachining process to the biocompatibility of 3C-SiC membranes

Nasir

Gan

Shukla

et al. 2014

2014 IEEE Conference on Biomedical Engineering and Sciences (IECBES)

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View full text Add to dashboard Cite

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The Study of Morphological Structure and Raman Spectra of 3C-SiC Membranes

Nasir

Leech

Reeves

et al. 2014

AMM

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In this paper, membranes of 3C-SiC with dimensions up to 10 mm x 15 mm2 have been fabricated in epitaxial 3C-SiC/ Si wafers by the means of photolithography, reactive ion etching of 3C-SiC and wet etching of Si. Scanning electron microscope (SEM) micrographs were used to observe the structure of the membrane and the wall formed by the Si wet etching. The quality of the 3C-SiC membranes were observed using Raman Spectroscopy. The remains of <111> Si substrate which was unetched during the Si wet etching were presented with the formation of microstructure defects which showed distinct peaks in comparison to the high quality 3C-SiC membranes at different position. Here, the effect of the membrane fabrication procedures to the 3C-SiC membrane properties especially the morphological structure and its Raman characteristics is discussed in detail.

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Specific contact resistance of ohmic contacts to n-type SiC membranes

Cited by 2 publications

References 11 publications

The effect of micromachining process to the biocompatibility of 3C-SiC membranes

The effect of micromachining process to the biocompatibility of 3C-SiC membranes

The Study of Morphological Structure and Raman Spectra of 3C-SiC Membranes

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