Specification of the effects of acoustic noise on optical tools

Gendreau, Michael

doi:10.1260/147547303322773471

Cited by 1 publication

(3 citation statements)

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“…Also, one wonders if the criteria for the few tools that represent a constant (or, in one case of one TEM, downward-sloping) amplitude sensitivity above 1000 Hz are realistic. Most of the tools become less sensitive above 500 or 1000 Hz, and this is consistent with our understanding of the likelihood of noise-induced vibration in machinery at high frequencies [5].…”

Section: Comparison Of Typical Tool Noise Specifications With Sensitisupporting

confidence: 80%

“…Thus, while it is currently common to use perception-based curves such as NC or NR to design and evaluate rooms for tools and instrumentation (in addition to their designation for humans), they may not well represent the general shape of the curves actually required for groups of tools or specific tools, which would influence the cost, practicality, and effectiveness of the design. That is, the use of curves designed for humans might produce over-or underdesigned rooms for instruments, at certain frequencies [5].…”

Section: History and Impetusmentioning

confidence: 99%

“…The formats of the available test data vary significantly [5]. The format of generic tool noise criterion curves (hereafter abbreviated "NCT") must be developed from practical considerations:…”

Section: Format Of Generic Tool Noise Criterion Curvesmentioning

confidence: 99%

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Generic noise criterion curves for sensitive equipment

Gendreau¹

2008

The Journal of the Acoustical Society of America

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Electron beam-based instruments are sensitive to the environment in which they operate. Adverse environments may limit their achievable resolution. Many equipment manufacturers provide specifications for the acceptable level of various environmental conditions, such as vibration, EMI, and acoustic noise. However, the quality of the specifications vary significantly, from well-defined to conjectural. Additionally, during the design of a facility, the specific instruments that will be used may not yet be known. Thus, it is useful to have "generic" criteria, intended to represent entire classes of instruments, to use in the design of facilities. Generic vibration criteria exist to aid in the design of laboratories, though there have been no such instrument-based generic criteria available for acoustic noise. The generic noise criteria that are currently used in lab design (NC, NR, dBA, etc.) were established to address the effect of noise on human beings. Using noise specifications for a significant number of instruments with varying resolving powers, correlation of resolution with environmental noise is demonstrated. Based on the data reviewed, generic noise criterion curves have been developed and presented for use in the design of facilities that contain noise-sensitive equipment. These are applicable when other well-defined and specific criteria are not available.

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Section: Comparison Of Typical Tool Noise Specifications With Sensitisupporting

confidence: 80%

Section: History and Impetusmentioning

confidence: 99%